1. Design and control of a single-stage dual-actuator system for high-precision manufacturing

   • Michael D. Kim
   • Kwang-Hee Lee
   • Sang-Moo Lee

   Technical Paper 20 December 2013 Pages: 175 - 183

   

2. Closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope

   • Yongsong He
   • Xiaosheng Wu
   • Wu Liu

   Technical Paper 02 August 2013 Pages: 185 - 191

   

3. Effects of geometric parameters for superhydrophobicity of polymer surfaces fabricated by precision tooling machines

   • Donghui Chu
   • Akihiro Nemoto
   • Hiroshi Ito

   Technical Paper 05 March 2013 Pages: 193 - 200

   

4. Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis

   • Liang He
   • Masaya Toda
   • Takahito Ono

   Technical Paper 17 March 2013 Pages: 201 - 208

   

5. Chemiluminescence detection for Cu (II) based on 1,10-Phenanthroline-hydrogen peroxide reaction on a PDMS microfluidic chip

   • Xueye Chen
   • Hong Zeng
   • Jincheng Yang

   Technical Paper 26 March 2013 Pages: 209 - 213

   

6. A study on effect of wafer bow in wafer-level BCB cap transfer packaging

   • Seonho Seok
   • Janggil Kim

   Technical Paper 27 March 2013 Pages: 215 - 219

   

7. Silicon 45° micromirrors fabricated by etching in alkaline solutions with organic additives

   • Krzysztof P. Rola
   • Konrad Ptasiński
   • Irena Zubel

   Technical Paper Open access 20 June 2013 Pages: 221 - 226

   

8. Transition interface for improving the temperature characteristics of micromachined gyroscopes

   • Zhanqiang Hou
   • Xuezhong Wu
   • Jianbin Su

   Technical Paper 04 August 2013 Pages: 227 - 234

   

9. Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators

   • Mohamed Sultan Mohamed Ali
   • Wang Ning Yuan
   • Kenichi Takahata

   Technical Paper 26 March 2013 Pages: 235 - 241

   

10. An experimental investigation of mixing of carbon nanotube/polymer composite in a batch-type screw mixer

    • Kyoung Duck Seo
    • Jang Min Park
    • Dong Sung Kim

    Technical Paper 08 October 2013 Pages: 243 - 250

    

11. A novel self-aligned electrostatic vertical actuator using plastic deformation technology

    • Wei Li
    • Zhaohui Song
    • Yuelin Wang

    Technical Paper 18 June 2013 Pages: 251 - 257

    

12. Preparation of sacrificial layer for MEMS devices by lift-off technology

    • Jie Yang
    • Yu Shi
    • Bo Du

    Technical Paper 30 October 2013 Pages: 259 - 263

    

13. A microacoustic analysis including viscosity and thermal conductivity to model the effect of the protective cap on the acoustic response of a MEMS microphone

    • D. Homentcovschi
    • R. N. Miles
    • A. J. Zuckerwar

    Technical Paper 12 April 2013 Pages: 265 - 272

    

14. Development of the automated gold-linked electrochemical immunoassay system for blood monitoring

    • Suguru Shiohara
    • Miyuki Chikae
    • Yuzuru Takamura

    Technical Paper 29 March 2013 Pages: 273 - 279

    

15. Design and analysis of a z-axis tuning fork gyroscope with guided-mechanical coupling

    • Thong Quang Trinh
    • Long Quang Nguyen
    • Hung Ngoc Vu

    Technical Paper 26 October 2013 Pages: 281 - 289

    

16. Modeling the instability of CNT tweezers using a continuum model

    • Amin Farrokhabadi
    • Ali Koochi
    • Mohamadreza Abadyan

    Technical Paper 25 June 2013 Pages: 291 - 302

    

17. Measurement of local electric field in microdevices for low-voltage electroporation of adherent cells

    • Hirofumi Shintaku
    • Kazumi Hakamada
    • Satoyuki Kawano

    Technical Paper 25 April 2013 Pages: 303 - 313

    

18. Droplet-based biochemical assay by magnetic wire manipulation between multiple droplets

    • Mitsuhiro Shikida
    • Tatsuaki Sugito
    • Hiroyuki Honda

    Technical Paper 04 April 2013 Pages: 315 - 323

    

19. Carbon nanotube based miniaturized electron gun and column assembly

    • Javad Koohsorkhi
    • Shamsoddin Mohajerzadeh

    Technical Paper 15 August 2013 Pages: 325 - 336

    

20. Design of novel compact anti-stiction and low insertion loss RF MEMS switch

    • Deepak Bansal
    • Amit Kumar
    • K. J. Rangra

    Technical Paper 11 May 2013 Pages: 337 - 340

    

21. New approach for batch microfabrication of silicon-based micro fuel cells

    • N. Sabaté
    • J. P. Esquivel
    • L. Fonseca

    Technical Paper 30 March 2013 Pages: 341 - 348