Combination of LIGA with other microstructure technologies W. MenzW. BacherD. Seidel Pages: 162 - 166
Knowledge based support for manufacturing of microstructures K. P. SchererP. BuchbergerU. Stucky Pages: 167 - 170
High aspect ratio multi-level mold inserts fabricated by mechanical micro machining and deep etch X-ray lithography J. FahrenbergT. SchallerW. K. Schomburg Pages: 174 - 177
Electrochemical post-processing of LIGA structures S. AkkarajuY. M. DestaM. C. Murphy Pages: 178 - 181
Molding of LIGA microstructures from fluorinated polymers R. RuprechtH. KalbW. Bacher Pages: 182 - 185
Application of deep reactive ion etching for silicon angular rate sensor J. ChoiK. MinamiM. Esashi Pages: 186 - 190
Design and simulation of high aspect ratio motion sensors L. YaoE. ChowanietzA. Lees Pages: 191 - 196
Experimental determination of mechanical properties of Ni and Ni-Fe microbars E. MazzaS. AbelJ. Dual Pages: 197 - 202