Combination of LIGA with other microstructure technologies

Abstract

 The combination of the LIGA technique with other microstructure technologies like silicon technology, membrane technologies, and mechanical micromachining gives access to the development and manufacturing of new microsystems. The quasi-monolithic integration of LIGA microstructures on top of a CMOS-Wafer using a molding process will be shown which has the potential to integrate a LIGA component directly with microelectronic circuits. By combining mechanical micromachining, plastic molding, and membrane technologies a micropump has been developed which is one of the key components of the fluid handling module of microanalysis systems together with the well known LIGA microspectrometer. In the case of the micro-spectrometer, a small-scale series production was installed.