1. LIGA activity in Taiwan

   • Y. Cheng

   Pages: 157 - 161

2. Combination of LIGA with other microstructure technologies

   • W. Menz
   • W. Bacher
   • D. Seidel

   Pages: 162 - 166

3. Knowledge based support for manufacturing of microstructures

   • K. P. Scherer
   • P. Buchberger
   • U. Stucky

   Pages: 167 - 170

4. The study of LIGA technique at NSRL

   • Y. Tian
   • Y. Hong
   • X. Tao

   Pages: 171 - 173

5. High aspect ratio multi-level mold inserts fabricated by mechanical micro machining and deep etch X-ray lithography

   • J. Fahrenberg
   • T. Schaller
   • W. K. Schomburg

   Pages: 174 - 177

6. Electrochemical post-processing of LIGA structures

   • S. Akkaraju
   • Y. M. Desta
   • M. C. Murphy

   Pages: 178 - 181

7. Molding of LIGA microstructures from fluorinated polymers

   • R. Ruprecht
   • H. Kalb
   • W. Bacher

   Pages: 182 - 185

8. Application of deep reactive ion etching for silicon angular rate sensor

   • J. Choi
   • K. Minami
   • M. Esashi

   Pages: 186 - 190

9. Design and simulation of high aspect ratio motion sensors

   • L. Yao
   • E. Chowanietz
   • A. Lees

   Pages: 191 - 196

10. Experimental determination of mechanical properties of Ni and Ni-Fe microbars

    • E. Mazza
    • S. Abel
    • J. Dual

    Pages: 197 - 202