![](https://media.springernature.com/w90/springer-static/cover/journal/11465/12/4.jpg?as=webp)
Volume 12, Issue 4
December 2017Special Issue—Micro-electromechanical systems (MEMS) (Guest Editor: Zhuangde JIANG)
13 articles in this issue
Special Issue—Micro-electromechanical systems (MEMS) (Guest Editor: Zhuangde JIANG)