Abstract
In the present paper, we aim to show the interest of combining Multiwavelength Anomalous Diffraction (MAD) and Diffraction Anomalous Fine Structure (DAFS) spectroscopy, in grazing incidence, to obtain structural properties (composition, strain and atomic ordering) of semiconductor heterostructures and nanostructures. As an example we report on preliminary results obtained on a series of Ge/Si(001) nano-island samples: pyramides and domes on nominal and prepatterned surfaces. For free standing domes, it is shown that the Ge content strongly depends on the growth condition with a tendency to increase from the bottom to the top of the nano-islands. There is also some indication of atomic ordering in the upper part of the islands. For small, capped pyramids, we show that the Diffraction Anomalous Fine Structure spectroscopy is the unique non destructive method that allows to recover the actual Ge content, the in-plane and out-of-plane strain and to detect atomic ordering.
Similar content being viewed by others
References
J. Stangl, V. Holý, G. Bauer, Rev. Mod. Phys. 76, 725 (2004)
Z. Yuan, B.E. Kardynal, R.M. Stevenson, et al., Science 295, 102 (2002)
U. Pietsch, V. Holý, T. Baumbach, High-resolution X-ray Scattering: From Thin Films to Lateral Nanostructures (Springer Verlag, New York, 2004)
H. Stragier, J.O. Cross, J.J. Rehr, et al., Phys. Rev. Lett. 69, 3064 (1992)
H. Renevier, J.-L. Hodeau, P. Wolfers, et al., Phys. Rev. Lett. 78, 2775 (1997)
M.G. Proietti, H. Renevier, J.-L. Hodeau, et al., Phys. Rev. B 59, 5479 (1999)
S. Grenier, M.G. Proietti, H. Renevier, et al., Europhys. Lett. 57, 499 (2002)
A. Letoublon, V. Favre-Nicolin, H. Renevier, et al., Phys. Rev. Lett. 92, 186101 (2004)
J. Coraux, V. Favre-Nicolin, M.G. Proietti, et al., Phys. Rev. B 73, 205343 (2006)
J. Coraux, H. Renevier, V. Favre-Nicolin, et al., Appl. Phys. Lett. 88, 153125 (2006)
J. Coraux, V. Favre-Nicolin, M.G. Proietti, et al., Phys. Rev. B 75, 235312 (2007)
T.U. Schülli, J. Stangl, Z. Zhong, G. Bauer, et al., Phys. Rev. Lett. 90, 066105 (2003)
C. Lamberti, Characterization of Semiconductor Heterostructures and Nanostructures (Elsevier Science, Amsterdam, 2008)
O.G. Schmidt, K. Eberl, IEEE Trans. Electr. Dev. 48, 1175 (2001)
G.S. Kar, S. Kiravittaya, B.Y. Nguyen, et al., Appl. Phys. Lett. 88, 253108 (2006)
D. Grützmacher, T. Fromherz, C. Dais, et al., Nano Lett. 7, 3150 (2007)
M.-I. Richard, T.U. Schülli, G. Renaud, et al., Phys. Rev. B (2008) (submitted)
M. De Seta, G. Capellini, F. Evangelisti, Phys. Rev. B 77, 045431 (2008)
T.U. Schülli, M. Stoffel, A. Hesse, et al., Phys. Rev. B 71, 035326 (2005)
M. Stoffel, A. Rastelli, O.G. Schmidt, Surf. Sci. 601, 3052 (2007)
M. Stoffel, A. Rastelli, J. Tersoff, et al., Phys. Rev. B 74, 155326 (2006)
M.-I. Richard, G. Chen, T.U. Schülli, et al., Surf. Sci. 602, 2157 (2008)
G. Katsaros, G. Costantini, M. Stoffel, et al., Phys. Rev. B 72, 195320 (2005)
A. Rastelli, M. Stoffel, A. Malachias, et al., Nano Lett. 8, 1404 (2008)
Z. Zhong, G. Bauer, Appl. Phys. Lett. 84, 1922 (2004)
G. Chen, H. Lichtenberger, G. Bauer, et al., Phys. Rev. B 74, 035302 (2006)
Z. Zhong, W. Schwinger, F. Schäffler, et al., Phys. Rev. Lett. 98, 176102 (2007)
A. Rastelli, E. Müller, H. von Känel, Appl. Phys. Lett. 80, 1438 (2002)
M. Stoffel, U. Denker, G.S. Kar, et al., Appl. Phys. Lett. 83, 2910 (2003)
J. Stangl, A. Hesse, V. Höly, O.G. Schmidt, et al., Appl. Phys. Lett. 82, 2251 (2002)
H. Renevier, S. Grenier, S. Arnaud, et al., J. Synchrotron Radiat. 10, 435 (2003)
I. Kegel, T.H. Metzger, A. Lorke, et al., Phys. Rev. B 63, 035318 (2001)
A. Malachias, T.U. Schülli, G. Medeiros-Ribeiro, et al., Phys. Rev. B 72, 165315 (2005)
A.L. Ankudinov, et al., Phys. Rev. B 58, 7565 (1998)
M. Newville, et al., Physica B 208-209, 154 (1995)
B. Ravel, M. Newville, J. Synchrotron Radiat. 12, 537 (2005)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Richard, MI., Katcho, N., Proietti, M. et al. Structural properties of Ge/Si(001) nano-islands by diffraction anomalous fine structure and multiwavelength anomalous diffraction. Eur. Phys. J. Spec. Top. 167, 3–10 (2009). https://doi.org/10.1140/epjst/e2009-00929-4
Published:
Issue Date:
DOI: https://doi.org/10.1140/epjst/e2009-00929-4