Skip to main content
Log in

Characterization of neutral loop discharges in the VINETA device

  • Regular Article
  • Published:
The European Physical Journal D Aims and scope Submit manuscript

Abstract

A neutral loop (NL) discharge has been implemented in the linear plasma device VINETA with three different antenna configurations. Radial profile measurements of the electron density, temperature and floating potential are performed at various neutral loop radii and compared to single particle simulations. Local density maxima are observed near the NL, for which several mechanisms have been proposed. The measured temperature profiles do not support the model of a thermal heating process, whereas the floating potential profiles corroborate the assumption of a locally enhanced induction current.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. H. Tsuboi, Jpn J. Appl. Phys. 34, 2476 (1995)

    Article  MathSciNet  ADS  Google Scholar 

  2. T. Gans, D.L. Crintea, D. O’Connell, U. Czarnetzki, J. Phys. D 40, 4508 (2007)

    Article  ADS  Google Scholar 

  3. Z. Yoshida, Jpn J. Appl. Phys. 34, 4213 (1995)

    Article  ADS  Google Scholar 

  4. W. Chen, Y. Morikawa, M. Itoh, T. Hayashi, K. Sugita, H. Shindo, T. Uchida, J. Vac. Sci. Technol. A, Vac. Surf. Films 17, 2546 (1999)

    Article  ADS  Google Scholar 

  5. H. Asakura, K. Takemura, Z. Yoshida, T. Uchida, JpnJ. Appl. Phys. 36, 4493 (1997)

    Article  ADS  Google Scholar 

  6. M. Vural, R.P. Brinkmann, J. Phys. D 40, 510 (2007)

    Article  ADS  Google Scholar 

  7. Z. Yoshida, H. Asakura, H. Kakuno, J. Morikawa, K. Takemura, S. Takizawa, T. Uchida, Phys. Rev. Lett. 81, 2458 (1998)

    Article  ADS  Google Scholar 

  8. T. Uchida, J. Phys. D 41, 083001 (2008)

    Article  Google Scholar 

  9. Y. Celik, D.L. Crintea, D. Luggenholscher, U. Czarnetzki, T. Ishijima, H. Sugai, Phys. Plasmas 18, 022107 (2011)

    Article  ADS  Google Scholar 

  10. C.M. Franck, O. Grulke, T. Klinger, Phys. Plasmas 9, 3254 (2002)

    Article  ADS  Google Scholar 

  11. C.M. Franck, O. Grulke, T. Klinger, Phys. Plasmas 10, 323 (2003)

    Article  ADS  Google Scholar 

  12. Y. Okraku-Yirenkyi, Y.M. Sung, M. Otsubo, C. Honda, T. Sakoda, J. Vac. Sci. Technol. A, Vac. Surf. Films 19, 2590 (2001)

    Article  ADS  Google Scholar 

  13. D. O’Connell, T. Gans, D.L. Crintea, U. Czarnetzki, N. Sadeghi, Plasma Sources Sci. Technol. 17, 024022 (2008)

    Article  ADS  Google Scholar 

  14. Y.M. Sung, T. Sakoda, J. Vac. Sci. Technol. A, Vac. Surf. Films 20, 1964 (2002)

    Article  ADS  Google Scholar 

  15. N.S. Braithwaite, J.P. Booth, G. Cunge, Plasma Sources Sci. Technol. 5, 677 (1996)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to A. von Stechow.

Rights and permissions

Reprints and permissions

About this article

Cite this article

von Stechow, A., Grulke, O. & Klinger, T. Characterization of neutral loop discharges in the VINETA device. Eur. Phys. J. D 66, 64 (2012). https://doi.org/10.1140/epjd/e2012-20542-6

Download citation

  • Received:

  • Revised:

  • Published:

  • DOI: https://doi.org/10.1140/epjd/e2012-20542-6

Keywords

Navigation