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Characterization of an atmospheric pressure plasma jet for surface modification and thin film deposition

  • Topical issue: Microplasmas: Scientific Challenges and Technological opportunities
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Abstract.

In this paper, an experimental study is presented to characterize a commercially available atmospheric pressure plasma jet (APPJ) kINPen which can be used for local surface modification, e.g. changing the wettability as well as for thin film deposition with silicon-organic and metal-organic precursors to enhance scratch resistance or to lower the gas permeability. Characterization of the jet discharge has been carried out by three methods: (i) measurement of the energy influx from the jet plasma to a substrate by a calorimetric probe, (ii) spatial resolved investigation of the plasma beam by optical emission spectroscopy (OES) and (iii) observation of the plasma jet by video imaging. The deposited SiO x and AlO x films were analyzed by XPS measurements.

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References

  1. E. Stoffels, A. Flikweert, W. Stoffels, G. Kroesen, Plasma Source. Sci. Technol. 11, 383 (2002)

    Article  ADS  Google Scholar 

  2. R. Foest, T. Bindemann, R. Brandenburg, E. Kindel, H. Lange, M. Stieber, K. Weltmann, Plasma Processes Polym. 4, S460 (2007)

    Article  Google Scholar 

  3. J. Schäfer, R. Foest, A. Quade, A. Ohl, K. Weltmann, J. Phys. D 41, 194010 (2008)

    Article  ADS  Google Scholar 

  4. M. Kuchenbecker, N. Bibinov, A. Kaemlimg, D. Wandke, P. Awakowicz, W. Vioel, J. Phys. D 42, 045212 (2009)

    Article  ADS  Google Scholar 

  5. P. Rajasekaran, P. Mertmann, N. Bibinov, D. Wandke, W. Viöl, P. Awakowicz, J. Phys. D 42, 225201 (2009)

    Article  ADS  Google Scholar 

  6. N. Bibinov, D. Dudek, P. Awakowicz, J. Engemann, J. Phys. D 40, 7372 (2007)

    Article  ADS  Google Scholar 

  7. M. Wolter, S. Bornholdt, M. Häckel, H. Kersten, Journal of Achievements in Materials and Manufacturing Engineering 37, 730 (2009)

    Google Scholar 

  8. J. Thornton, J. Vac. Sci. Technol. 11, 666 (1974)

    Article  ADS  Google Scholar 

  9. I. Hussla, K. Enke, H. Grunwald, G. Lorenz, H. Stoll, J. Phys. D 20, 889 (1987)

    Article  ADS  Google Scholar 

  10. H. Deutsch, H. Kersten, S. Klagge, A. Rutscher, Contrib. Plasma Phys. 28, 149 (1988)

    Article  ADS  Google Scholar 

  11. H. Deutsch, H. Kersten, A. Rutscher, Contrib. Plasma Phys. 29, 263 (1989)

    Article  ADS  Google Scholar 

  12. S. Bernstein, T. Wong, R. Tustison, J. Vac. Sci. Technol. B 12, 605 (1994)

    Article  Google Scholar 

  13. S. Kugler, K. Shimakawa, T. Watanabe, K. Hayashi, I. László, R. Bellissent, J. Non Cryst. Solids 164, 1143 (1993)

    Article  ADS  Google Scholar 

  14. H. Brune, H. Röder, K. Bromann, K. Kern, Thin Solid Films 264, 230 (1995)

    Article  ADS  Google Scholar 

  15. H. Windischmann, J. Appl. Phys. 62, 1800 (1987)

    Article  ADS  Google Scholar 

  16. S. Rossnagel, Thin Solid Films 171, 125 (1989)

    Article  ADS  Google Scholar 

  17. K. Müller, Phys. Rev. B 35, 7906 (1987)

    Article  ADS  Google Scholar 

  18. R. Nimmagadda, J. Vac. Sci. Technol. 8, 85 (1971)

    Article  ADS  Google Scholar 

  19. J. Thornton, Thin Solid Films 54, 23 (1978)

    Article  ADS  Google Scholar 

  20. M. Wolter, M. Stahl, H. Kersten, Vacuum 83, 768 (2008)

    Article  Google Scholar 

  21. R. Foest, M. Schmidt, K. Becker, Int. J. Mass Spectrom. 248, 87 (2006)

    Article  ADS  Google Scholar 

  22. K. Becker, K. Schoenbach, J. Eden, J. Phys. D 39, R55 (2006)

    Article  ADS  Google Scholar 

  23. Technical report, INP Greifswald e.V. Felix-Hausdorff-Str. 2 17489 Greifswald, Germany

  24. R. Foest, E. Kindel, H. Lange, A. Ohl, M. Stieber, K. Weltmann, Contrib. Plasma Phys. 47, 119 (2007)

    Article  ADS  Google Scholar 

  25. R. Wendt, K. Ellmer, K. Wiesemann, J. Appl. Phys. 82, 2115 (1997)

    Article  ADS  Google Scholar 

  26. M. Wolter, M. Stahl, H. Kersten, Plasma Processes Polym. 6, S626 (2009)

    Article  Google Scholar 

  27. M. Stahl, T. Trottenberg, H. Kersten, Rev. Sci. Instrum. 81, 023504 (2010)

    Article  ADS  Google Scholar 

  28. H. Kersten, H. Deutsch, H. Steffen, G. Kroesen, R. Hippler, Vacuum 63, 385 (2001)

    Article  Google Scholar 

  29. H. Kersten, E. Stoffels, W. Stoffels, M. Otte, C. Csambal, H. Deutsch, R. Hippler, J. Appl. Phys. 87, 3637 (2000)

    Article  ADS  Google Scholar 

  30. M. Quitzau, M. Wolter, H. Kersten, Plasma Processes Polym. 6, S392 (2009)

    Article  Google Scholar 

  31. www.casaxps.com (2009), accessed in April 2010

  32. National Institute Standards and Technology, Nist atomic spectra database (2009), http://www.nist.gov/physlab/data/asd.cfm, accessed in September 2010

  33. W. Demtröder, Laserspektroskopie: Grundlagen und Techniken (Springer, 2004)

  34. V. Ochkin, S. Kittell, Spectroscopy of low temperature plasma (Wiley-VCH, 2009)

  35. J. Seinfeld, S. Pandis, Atmospheric chemistry and physics: From air pollution to climate change (John Wiley, Sons., Inc., New York, 1998)

  36. U. Kogelschatz, B. Eliasson, W. Egli, Pure Appl. Chem. 71, 1819 (1999)

    Article  Google Scholar 

  37. J. Schäfer, R. Foest, A. Quade, A. Ohl, K. Weltmann, Plasma Processes Polym. 6, S519 (2009)

    Article  Google Scholar 

Download references

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Authors and Affiliations

  1. Institute of Experimental and Applied Physics, Christian-Albrechts-Universität zu Kiel, 24098, Kiel, Germany

    S. Bornholdt, M. Wolter & H. Kersten

Authors
  1. S. Bornholdt
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  2. M. Wolter
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  3. H. Kersten
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Correspondence to H. Kersten.

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Bornholdt, S., Wolter, M. & Kersten, H. Characterization of an atmospheric pressure plasma jet for surface modification and thin film deposition. Eur. Phys. J. D 60, 653–660 (2010). https://doi.org/10.1140/epjd/e2010-00245-x

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  • DOI: https://doi.org/10.1140/epjd/e2010-00245-x

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