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Influence of the surface conditions on rf plasma characteristics

  • Topical issue: 23rd Symposium on Plasma Physics and Technology
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Abstract

The secondary electron emission is a surface dependent phenomenon, more influenced by surface preparation than by the material itself. The present paper deals with the effect of the electrode surface conditions: clean (atomically clean) and contaminated electrodes (standard conditions even after mechanical and chemicals cleaning) on the characteristics of an asymmetric discharge by PIC/MCC simulations. In the arrangement with one clean and one contaminated electrode the discharge characteristics strongly depend upon which electrode is powered. The obtained PIC/MCC simulation results indicate that contamination of electrodes and variations of the secondary electron emission coefficients can lead to more or less significant changes in properties of rf plasmas.

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Authors and Affiliations

  1. Institute of Physics, Pregrevica 118, 11080, Belgrade, Serbia

    M. Radmilović-Radjenović & Z. Lj. Petrović

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  1. M. Radmilović-Radjenović
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  2. Z. Lj. Petrović
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Correspondence to M. Radmilović-Radjenović.

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Radmilović-Radjenović, M., Petrović, Z. Influence of the surface conditions on rf plasma characteristics. Eur. Phys. J. D 54, 445–449 (2009). https://doi.org/10.1140/epjd/e2009-00004-2

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  • DOI: https://doi.org/10.1140/epjd/e2009-00004-2

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