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Silica Glass for High-Q Mechanical Resonators

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Inorganic Materials Aims and scope

Abstract—

This paper addresses issues related to the choice of materials for the fabrication of high-Q mechanical resonators. It has been shown that the best material combining a low level of thermoelastic losses and small bulk internal friction is silica glass. Given its excellent dissipative characteristics and relatively low cost, silica glass prepared via high-temperature hydrolysis of silicon tetrachloride in an oxygen–hydrogen flame is the most promising material for such resonators.

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ACKNOWLEDGMENTS

We are grateful to R.Sh. Nasyrov for his assistance in preparing the manuscript.

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Authors and Affiliations

  1. Moscow State University, 119991, Moscow, Russia

    B. S. Lunin

  2. South Ural State University (Miass Branch), pr. Oktyabrya 16, 456318, Miass, Chelyabinsk oblast, Russia

    V. M. Lopatin

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  1. B. S. Lunin
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  2. V. M. Lopatin
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Correspondence to B. S. Lunin.

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Translated by O. Tsarev

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Lunin, B.S., Lopatin, V.M. Silica Glass for High-Q Mechanical Resonators. Inorg Mater 56, 292–296 (2020). https://doi.org/10.1134/S0020168520030103

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