Abstract—
This paper examines mechanisms responsible for internal friction in the surface layer of fused quartz, which degrades the performance of high-Q mechanical resonators. We propose a combined process for surface treatment of such resonators, which includes asymptotic mechanical treatment, chemical removal of a surface glass zone, and secondary annealing for stress relieve in the material. Data are presented that demonstrate adequacy of this approach. The proposed process allows one to fabricate fused quartz mechanical resonators with a quality factor of 107 and above.
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Lunin, B.S., Lopatin, V.M. Surface Internal Friction in High-Q Fused Quartz Resonators. Inorg Mater 58, 636–642 (2022). https://doi.org/10.1134/S0020168522050077
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DOI: https://doi.org/10.1134/S0020168522050077