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Energy filtration of secondary and backscattered electrons by the method of the retarding potential in scanning electron and ion microscopy

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Abstract

Data for the study of various contrasts in the methods of scanning electron and ion microscopy with the energy filtration of signals from secondary and reflected electrons are presented. A model of the formation of contrast by secondary electrons in a helium scanning electron microscope is formulated. The possibility of contrast amplification via energy filtration in a helium ion microscope as well as the chance of recording reflected ions by means of secondary electron detection is demonstrated. The recorded data for the material contrast in low-voltage electron microscopy at various acceleration voltages and different modes of energy filtration are given. The possibility of enhancing or reducing material contrast by means of energy filtration is shown.

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Authors and Affiliations

  1. Department of Physics, St. Petersburg State University, St. Petersburg, Peterhof, 198504, Russia

    V. Yu. Mikhailovskii, Yu. V. Petrov & O. F. Vyvenko

Authors
  1. V. Yu. Mikhailovskii
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  2. Yu. V. Petrov
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  3. O. F. Vyvenko
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Corresponding author

Correspondence to V. Yu. Mikhailovskii.

Additional information

Original Russian Text © V.Yu. Mikhailovskii, Yu.V. Petrov, O.F. Vyvenko, 2015, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2015, No. 2, pp. 93–99.

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Mikhailovskii, V.Y., Petrov, Y.V. & Vyvenko, O.F. Energy filtration of secondary and backscattered electrons by the method of the retarding potential in scanning electron and ion microscopy. J. Surf. Investig. 9, 196–202 (2015). https://doi.org/10.1134/S1027451014060378

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  • DOI: https://doi.org/10.1134/S1027451014060378

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