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Application of the Methods Used to Interpret the Electron Spectroscopy Spectra to Interpret Ion Spectroscopy Signals

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Abstract

An analytical model for describing the energy spectra of light medium-energy ions reflected from the surface of a solid, or medium-energy ion spectra (MEIS), is constructed. The method is based on the OKG (Oswald–Kasper–Gaukler) method, which has been reliably tested and widely used in electron spectroscopy. A technique is developed for interpreting the MEIS spectra of ions reflected from layered inhomogeneous samples. In this paper, we show that the interpretation of MEIS data based on the use of data available in the literature on the average energy loss per unit length (stopping power) can lead to such significant errors that it does not allow us to consider MEIS as a quantitative technique. It is pointed out that the approach developed in this paper makes it possible to successfully test the stopping power data.

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Funding

This study was carried out as part of state assignment no. FSFW-2020-0023.

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  1. National Research University “Moscow Power Engineering Institute”, 111250, Moscow, Russia

    V. P. Afanasiev & L. G. Lobanova

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  1. V. P. Afanasiev
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  2. L. G. Lobanova
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Correspondence to V. P. Afanasiev or L. G. Lobanova.

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Afanasiev, V.P., Lobanova, L.G. Application of the Methods Used to Interpret the Electron Spectroscopy Spectra to Interpret Ion Spectroscopy Signals. Russ Microelectron 51, 210–219 (2022). https://doi.org/10.1134/S1063739722040035

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