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Scanning Microwave Microscopy Characterization of Spin-Spray-Deposited Ferrite/Nonmagnetic Films

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Abstract

In this study, we performed single-grain-boundary characterization of ferrite films at radio and microwave frequencies using scanning microwave microscopy (SMM). The sample consisted of Fe3O4/photoresist/Fe3O4 multilayers deposited on glass substrate at 90°C by spin-spray coating. SMM images were recorded at various resonant frequencies between 2.0 GHz and 8.0 GHz. These images showed higher electrical conductivity at grain boundaries than at the core of grains. This phenomenon can be explained by space-charge accumulation at the grain boundary.

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Authors and Affiliations

  1. Department of Electrical Engineering, Wright State University, Dayton, OH, 45435, USA

    Yun Xing, Joshua Myers & Yan Zhuang

  2. Department of Electrical and Computer Engineering, Northeastern University, Boston, MA, 02115, USA

    Ogheneyunume Obi & Nian X. Sun

Authors
  1. Yun Xing
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  2. Joshua Myers
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  3. Ogheneyunume Obi
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  4. Nian X. Sun
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  5. Yan Zhuang
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Correspondence to Yan Zhuang.

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Xing, Y., Myers, J., Obi, O. et al. Scanning Microwave Microscopy Characterization of Spin-Spray-Deposited Ferrite/Nonmagnetic Films. J. Electron. Mater. 41, 530–534 (2012). https://doi.org/10.1007/s11664-011-1874-8

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  • DOI: https://doi.org/10.1007/s11664-011-1874-8

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