Abstract
In the last 10 years, the state of the art in nanoelectronics, including nanomagnetics, has rapidly gone from devices at or above 100 nm in size to the realm of 30 nm and below, with a well-defined pathway to devices (including transistors for logic and memory) of about 15 nm. In the process of reaching this size, the thickness of the critical layers in many structures is approaching 1 nm; the threshold voltage of a metal-oxide semiconductor field effect transistor (MOSFET) device is now controlled by fewer than 100 atoms, and the line edge roughness requirements are a few nanometers. All of these advances have resulted in an increased demand for near-atomic-level control for deposition, patterning, and characterization.
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References
G.E. Moore, Cramming more components onto integrated circuits. Electronics 38(8), 114–117 (1965)
R.H. Dennard, F.H. Gaensslen, H.-N. Yu, V.L. Rideout, E. Bassous, A.R. LeBlanc, Design for ion-implanted MOSFET’s with very small physical dimensions. IEEE J. Solid State Circ. SC-9(5), 256–268 (1974)
D.J. Frank, Power-constrained device and technology design for the end of scaling. Int. Electron. Devices. Meet. (IEDM) 2002 Dig, 643–646 (2002). doi: 10.1109/IEDM.2002.1175921
B.H. Lee, S.C. Song, R. Choi, P. Kirsch, Metal electrode/high-k dielectric gate-stack technology for power management. IEEE Trans. Electron Devices 55(1), 8–20 (2008). doi:10.1109/TED.2007.911044
S. Sivakumar, Lithography challenges for 32 nm technologies and beyond. Int. Electron. Device. Meet. 2006, 1–4 (2006). doi:10.1109/IEDM.2006.346952
B. Wu, A. Kumar, Extreme ultraviolet lithography: a review. J. Vac. Sci. Technol. B Microelectron. Nanometer Struct. 25(6), 1743–1761 (2007). doi:10.1116/1.2794048
H. Schift, Nanoimprint lithography: an old story in modern times? A review. J. Vac. Sci. Technol. B Microelectron. Nanometer Struct. 26(2), 458–480 (2008). doi:10.1116/1.2890972
D. Pires, J.L. Hedrick, A. De Silva, J. Frommer, B. Gotsmann, H. Wolf, D. Michel, U. Duerig, A.W. Knoll, Nanoscale three-dimensional patterning of molecular resists by scanning probes. Science 328, 732–735 (2010)
G.S. Craig, P.F. Nealey, Exploring the manufacturability of using block copolymers as resist materials in conjunction with advanced lithographic tools. J. Vac. Sci. Technol. B 25(6), 1969–1975 (2007). doi:10.1116/1.2801888
W. Lu, A.M. Sastry, Self-assembly for semiconductor industry. IEEE Trans. Semicond. Manuf. 20(4), 421–431 (2007). doi:10.1109/TSM.2007.907622
S. Tiwari, F. Rana, K. Chan, H. Hanafi, Wei Chan, D. Buchanan, Int. Electron. Devices. Meet., 521–524 (1995). doi: 10.1109/IEDM.1995.499252
K.-M. Chang, Silicon nanocrystal memory: technology and applications. Int Solid-State Integr Circ Technol (ICSICT ’06), 25–728 (2006). doi: 10.1109/ICSICT.2006.306469
Freescale Semiconductor, Inc, Thin film storage (TFS) with flex memory technology (2010), Available at: http://www.freescale.com/webapp/sps/site/overview.jsp?nodeId=0ST287482188DB3.Accessed 14 May 2010
G.W. Burr, M.J. Breitwisch, M.F. Franceschini, D. Garetto, K. Gopalakrishnan, B. Jackson, B. Kurdi, C. Lam, L.A. Lastras, A. Padilla, B. Rajendran, S. Raoux, R.S. Shenoy, Phase change memory technology. J. Vac. Sci. Technol. B 28, 223–262 (2010). doi:10.1116/1.3301579
L.O. Chua, Memristor: the missing circuit element. IEEE Trans. Circuit Theory CT18, 507–519 (1971). doi:0.1109/TCT.1971.1083337
D.B. Strukov, G.S. Snider, D.R. Stewart, R.S. Williams, The missing memristor found [Letter]. Nature 453(7191), 80–83 (2008). doi:10.1038/nature06932
J.J. Yang, M.D. Pickett, X. Li, D.A.A. Ohlberg, D.R. Stewart, R.S. Williams, Memristive switching mechanism for metal-oxide-metal nanodevices. Nat. Nanotechnol. 3, 429–433 (2008)
P. Vontobel, W. Robinett, J. Straznicky, P.J. Kuekes, R.S. Williams, Writing to and reading from a nano-scale crossbar memory based on memristors. Nanotechnology 20, 425204 (2009)
J. Borghetti, Z. Li, J. Strasnicky, X. Li, D.A.A. Ohlberg, W. Wu, D.R. Stewart, R.S. Williams, A hybrid nanomemristor/transistor logic circuit capable of self-programming. Proc. Natl. Acad. Sci. U.S.A. 106, 1699–1703 (2009)
J. Borghetti, G.S. Snider, P.J. Kuekes, J.J. Yang, D.R. Stewart, R.S. Williams, ‘Memristive’ switches enable ‘stateful’ logic operations via material implication. Nature 464, 873–876 (2010). doi:10.1038/nature08940
J.A. Katine, F.J. Albert, R.A. Buhrman, E.B. Myers, D.C. Ralph, Current-driven magnetization reversal and spin-wave excitations in Co/Cu/Co pillars. Phys. Rev. Lett. 84, 3149–3152 (2000)
M. Jurczak, N. Collaert, A. Veloso, T. Hoffmann, S. Biesemans, Review of FINFET technology. IEEE Int. SOI Conf, 1–4 (2009). doi:10.1109/SOI.2009.5318794
W. Lu, Nanowire based electronics: challenges and prospects. IEDM 2009, 1–4 (2009). doi:10.1109/IEDM.2009.5424283
P. Avouris, J. Appenzeller, R. Martel, S. Wind, Carbon nanotube electronics. Proc. IEEE 91(11), 1772–1784 (2003). doi:10.1109/JPROC.2003.818338
R.K. Cavin, V.V. Zhirnov, Silicon nanoelectronics and beyond: reflections from a semiconductor industry-government workshop. J. Nanopart. Res. 8, 137–147 (2004)
R.K. Cavin, V.V. Zhirnov, G.I. Bourianoff, J.A. Hutchby, D.J.C. Herr, H.H. Hosack, W.H. Joyner, T.A. Wooldridge, A long-term view of research targets in nanoelectronics. J. Nanopart. Res. 7, 573–586 (2005)
R.K. Cavin, V.V. Zhirnov, D.J.C. Herr, A. Avila, J. Hutchby, Research directions and challenges in nanoelectronics. J. Nanopart. Res. 8, 841–858 (2006)
J.J. Welser, G.I. Bourianoff, V.V. Zhirnov, R.K. Cavin, The quest for the next information processing technology. J. Nanopart. Res. 10(1), 1–10 (2008)
K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, Y. Zhang, S.V. Dubonos, I.V. Grigorieva, A.A. Firsov, Electric field effect in atomically thin carbon films. Science 306, 666–669 (2004). doi:10.1126/science.1102896
J. Wang, J.B. Neaton, H. Zheng, V. Nagarajan, S.B. Ogale, B. Liu, D. Viehland, V. Vaithyanathan, D.G. Schlom, U.V. Waghmare, N.A. Spaldin, K.M. Rabe, M. Wuttig, R. Ramesh, Epitaxial BiFeO3 multiferroic thin film heterostructures. Science 299, 1719 (2003)
M.I. D’yakonov, V.I. Perel’, Possibility of orientating electron spins with current. JETP Lett. 13, 467–469 (1971)
Y.K. Kato, R.C. Myers, A.C. Gossard, D.D. Awschalom, Observation of the spin Hall effect in semiconductors. Science 306, 1910 (2004)
J. Wunderlich, B. Kaestner, J. Sinova, T. Jungwirth, Experimental observation of the spin-Hall effect in a two-dimensional spin-orbit coupled semiconductor system. Phys. Rev. Lett. 94, 047204 (2005)
B.A. Bernevig, T.L. Hughes, S.-C. Zhang, Quantum spin hall effect and topological phase transition in HgTe quantum wells. Science 314(5806), 1757 (2006). doi:10.1126/science.1133734
Y.L. Chen, J.G. Analytis, J.-H. Chu, Z.K. Liu, S.-K. Mo, X.L. Qi, H.J. Zhang, D.H. Lu, X. Dai, Z. Fang, S.C. Zhang, I.R. Fisher, Z. Hussain, Z.-X. Shen, Experimental realization of a three-dimensional topological insulator, Bi2Te3. Science 325, 178–181 (2009). doi:10.1126/science.1173034
M. König, S. Wiedmann, C. Brüne, A. Roth, H. Buhmann, L.W. Molenkamp, X.-L. Qi, S.-C. Zhang, Quantum spin hall insulator state in HgTe quantum wells. Science 318(5851), 766–770 (2007). doi:10.1126/science.1148047
T. Dietl, H. Ohno, F. Matsukura, J. Cibert, D. Ferrand, Zener model description of ferromagnetism in zinc-blend magnetic semiconductors. Science 287, 1019 (2000)
H. Ohno, A. Shen, F. Matsukura, A. Oiwa, A. Endo, S. Katsumoto, Y. Iye, (Ga, Mn)As: a new diluted magnetic semiconductor based on GaAs. Appl. Phys. Lett. 69, 363 (1996). doi:10.1063/1.118061
K. Terabe, T. Hasegawa, T. Nakayama, M. Aono, Quantized conductance atomic switch. Nature 433, 47–49 (2005)
P.R. Wallace, The band theory of graphite. Phys. Rev. 71, 622–634 (1947). doi:10.1103/PhysRev.71.622
J.W. May, Platinum surface LEED rings. Surf. Sci. 17, 267–270 (1969). doi:10.1016/0039-6028(69)90227-1
A.J. Van Bommel, J.E. Crombeen, A. Van Tooren, LEED and Auger electron observations of the SiC(0001) surface. Surf. Sci. 48, 463–472 (1975). doi:10.1016/0039-6028(75)90419-7
H.P. Boem, A. Clauss, G.O. Fischer, U. Hofmann, Thin carbon leaves. Z. Naturforsch. 17b, 150–153 (1962)
K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, M.I. Katsnelson, I.V. Grigorieva, S.V. Dubonos, A.A. Firsov, Two-dimensional gas of massless Dirac fermions in graphene. Nature 438, 197–200 (2005). doi:10.1038/nature04233
Y. Zhang, Y.-W. Tan, H.L. Stormer, P. Kim, Experimental observation of the quantum Hall effect and Berry’s phase in graphene. Nature 438, 201–204 (2005)
A.K. Geim, A.K. Novoselov, The rise of graphene. Nat. Mater. 6, 183–191 (2007). doi:10.1038/nmat1849
K.I. Bolotin, K.J. Sikes, Z. Jiang, G. Fundenberg, J. Hone, P. Kim, H.L. Stormer, Ultrahigh electron mobility in suspended graphene. Solid State Commun. 146, 351–355 (2008). doi:10.1016/j.ssc.2008.02.024
A.K. Geim, Graphene: status and prospects. Science 324, 1530–1534 (2009). doi:10.1126/science.1158877
E. McCann, Asymmetry gap in the electronic band structure of bilayer graphene. Phys. Rev. B 74, 161403(R) (2006). doi:10.1103/PhysRevB.74.161403
J.B. Oostinga, H.B. Heersche, X. Liu, A.F. Morpurgo, L.M.K. Vandersypen, Gate-induced insulating state in bilayer graphene devices. Nat. Mater. 7, 151–157 (2008). doi:10.1038/nmat2082
F. Xia, D.B. Farmer, Y.-M. Lin, P. Avouris, Graphene field-effect transistors with high on/off current ratio and large transport band gap at room temperature. Nano Lett. 10, 715–718 (2010). doi:10.1021/nl9039636
C. Berger, Z. Song, T. Li, X. Li, A.Y. Ogbazghi, R. Feng, Z. Dai, A.N. Marchenkov, E.H. Conrad, P.N. First, W.A. de Heer, Ultrathin epitaxial graphite: 2D electron gas properties and a route toward graphene-based nanoelectronics. J. Phys. Chem. B 108, 19912–19916 (2004). doi:10.1021/jp040650f
A. Reina, X. Jia, J. Ho, D. Nezich, H. Son, V. Bulovic, M.S. Dresselhaus, J. Kong, Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition. Nano Lett. 9, 30–35 (2009). doi:10.1021/nl801827v
X. Li, W. Cai, J. An, S. Kim, J. Nah, D. Yang, R. Piner, A. Velamakanni, I. Jung, E. Tutuc, S.K. Banerjee, L. Colombo, R. Ruoff, Large-area synthesis of high-quality and uniform graphene films on copper foils. Science 324, 1312–1314 (2009). doi:10.1126/science.1171245
Y.-M. Lin, H.-Y. Chiu, K.A. Jenkins, D.B. Farmer, P. Avouris, A. Valdes-Garcia, Dual-gate graphene FETs with of 50 GHz. IEEE Electron Device Lett. 31, 68–70 (2010). doi:0.1109/LED.2009.2034876
J.S. Moon, D. Curtis, M. Hu, D. Wong, C. McGuire, P.M. Campbell, G. Jernigan, J.L. Tedesco, B. VanMil, R. Myers-Ward, C. Eddy, D.K. Gaskill, Epitaxial-graphene RF rield-effect transistors on Si-face 6 H-SiC substrates. IEEE Electron Device Lett. 30, 650–652 (2009). doi:10.1109/LED.2009.2020699
Y.-M. Lin, C. Dimitrakopoulos, K.A. Jenkins, D.B. Farmer, H.-Y. Chiu, A. Grill, Ph Avouris, 100-GHz transistors from wafer-scale epitaxial graphene. Science 327(5966), 662 (2010). doi:10.1126/science.1184289
F. Xia, T. Mueller, Y.-M. Lin, A. Valdes-Garcia, Ph Avouris, Ultrafast graphene photodetector [Letter]. Nat. Nanotechnol. 4, 839–843 (2009). doi:10.1038/nnano.2009.292
T. Mueller, F. Xia, P. Avouris, Graphene photodetectors for high-speed optical communications [Letter]. Nat. Photonics 4, 297–301 (2010). doi:10.1038/nphoton.2010.40
V.V. Chelanov, V. Fal’ko, B. Altshuler, The focusing of electron flow and a Veselago lens in graphene p-n junctions. Science 315, 1252–1255 (2007)
S.K. Banerjee, L.F. Register, E. Tutuc, D. Reddy, A.H. MacDonald, Bilayer pseudospin field-effect transistor (BiSFET): a proposed new logic device. IEEE Electron Devices. Lett. 30(2), 158–160 (2009)
H.Min, G. Borghi, M. Polini, A.H. MacDonald, Pseudospin magnetism in graphene. Phys. Rev. B 77(17 Jan), 041407–1 (2008). doi: 10.1103/PhysRevB.77.041407
J.-J. Su, A.H. MacDonald, How to make a bilayer exciton condensate flow. Nat. Phys. 4, 799–802 (2008)
T. Miyazaki, N. Tezuka, Giant magnetic tunneling effect in Fe/Al2O3/Fe junction. J. Magn. Magn. Mater. 139, L231–L234 (1995)
J.S. Moodera, L.R. Kinder, T.M. Wong, R. Meservey, Large magnetoresistance at room-temperature in ferromagnetic thin-film tunnel-junctions. Phys. Rev. Lett. 74, 3273–3276 (1995)
S. Tehrani, J.M. Slaughter, E. Chen, M. Durlam, J. Shi, M. DeHerrera, Progress and outlook for MRAM technology. IEEE Trans. Magn. 35, 2814–2819 (1999)
B.N. Engel, J. Akerman, B. Butcher, R.W. Dave, M. DeHerrera, M. Durlam, G. Grynkewich, J. Janesky, S.V. Pietambaram, N.D. Rizzo, J.M. Slaughter, K. Smith, J.J. Sun, S. Tehrani, A 4-Mb toggle MRAM based on a novel bit and switching method. IEEE Trans. Magn. 41, 132–136 (2005)
W.H. Butler, X.G. Zhang, T.C. Shulthess, J.M. MacLaren, Spin-dependent tunneling conductance of Fe/Mg.OFe sandwiches. Phys. Rev. B 63, 0544416 (2001)
S.S.P. Parkin, M. Hayashi, L. Thomas, Magnetic domain wall racetrack memory. Science 320, 209–211 (2008)
S.A. Wolf, D.D. Awschalom, R.A. Buhrman, J.M. Daughton, S. Von Molnar, M.L. Roukes, A.Y. Chelkanova, D.M. Treger, Spintronics: a spin based electronics vision for the future. Science 294, 1488–1495 (2001)
H.M. Saavedra, T.J. Mullen, P.P. Zhang, D.C. Dewey, S.A. Claridge, P.S. Weiss, Hybrid approaches in nanolithography. Rep. Prog. Phys. 73, 036501 (2010). doi:10.1088/0034-4885/73/3/036501
W. Eerenstein, N.D. Mathur, J.F. Scott, Multiferroic and magnetoelectric materials. Nature 442(17), 759–765 (2006). doi:10.1038/nature05023
D. Jorgenson, Moore’s law and the emergence of the new economy. Semiconductor Industry Association 2005 annual report: 2020 is closer than you think, pp. 16–20 (2005), Available online: http://www.sia-online.org/galleries/annual_report/Annual%20Report%202005.pdf
U.S. Environmental Protection Agency (U.S. EPA). (August 2). Report to Congress on server and data center energy efficiency Public Law 109–431 (2007), Available online: http://www.energystar.gov/
American Council for an Energy-Efficient Economy, Semiconductor technologies: the potential to revolutionize U.S. energy productivity (ACEEE, Washington, D.C, 2009), Available online: http://www.aceee.org/pubs/e094.htm
S.A. Wolf, J. Lu, M. Stan, E. Chen, D.M. Treger, The promise of nanomagnetics and spintronics for future logic and universal memory. Proc. IEEE. 98, 2155–2168 (2010), Available at: http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=05640335. Accessed 12 Dec 2010
A. Orlov, A. Imre, G. Csaba, L. Ji, W. Porod, G.H. Bernstein, Magnetic quantum-dot cellular automata: recent developments and prospects. J. Nanoelectron. Optoelectron. 3, 55–68 (2008)
R. Hanson, D.D. Awschalom, Coherent manipulation of single spins in semiconductors. Nature 453, 1043–1049 (2008)
J.C. Slonczewski, Current-driven excitation of magnetic multilayers. J. Magn. Magn. Mater. 159, L1–L7 (1996)
S.I. Kiselev, J.C. Sankey, I.N. Krivorotov, N.C. Emley, R.J. Schoelkopf, R.A. Buhrman, D.C. Ralph, Microwave oscillations of a nanomagnet driven by a spin-polarized current. Nature 425, 380–383 (2003)
T. Durkop, S.A. Getty, E. Cobas, M.S. Fuhrer, Extraordinary mobility in semiconducting carbon nanotubes. Nano Lett. 4, 35–39 (2004)
A.D. Franklin, G. Tulevski, J.B. Hannon, Z. Chen, Can carbon nanotube transistors be scaled without performance degradation? IEEE IEDM Tech. Dig. 561–564 (2009)
A. Javey, J. Guo, Q. Wang, M. Lundstrom, H. Dai, Ballistic carbon nanotube field-effect transistors. Nature 424, 654–657 (2003)
S.J. Wind, Appenzeller, Ph Avouris, Lateral scaling in carbon nanotube field-effect transistors. Phys. Rev. Lett. 91, 058301-1–058301-4 (2003)
J. Appenzeller, Y.-M. Lin, J. Knoch, Ph Avouris, Band-to-band tunneling in carbon nanotube field-effect transistors. Phys. Rev. Lett. 93, 196805-1–196805-4 (2004)
J. Appenzeller, Y.-M. Lin, J. Knoch, Ph Avouris, Comparing carbon nanotube transistors – the ideal choice: a novel tunneling device design. IEEE Trans. Electron Devices 52, 2568–2576 (2005)
S.O. Koswatta, D.E. Nikonov, M.S. Lundstrom, Computational study of carbon nanotube p-i-n tunneling FETs. IEDM Tech. Dig. 2005, 518–521 (2004)
J. Knoch, J. Appenzeller, Carbon nanotube field-effect transistors—The importance of being small, in AmIware, hardware technology drivers of ambient intelligence, ed. by S. Mukherjee, E. Aarts, R. Roovers, F. Widdershoven, M. Ouwerkerk (Springer, New York, 2006), pp. 371–402
J. Knoch, W. Riess, J. Appenzeller, Outperforming the conventional scaling rules in the quantum capacitance limit. IEEE Electron Devices Lett. 29, 372–374 (2008)
Z. Chen, J. Appenzeller, Y.-M. Lin, J.S. Oakley, A.G. Rinzler, J. Tang, S. Wind, P. Solomon, Ph Avouris, An integrated logic circuit assembled on a single carbon nanotube. Science 311, 1735 (2006)
S. Bae, H.K. Kim, Y. Lee, X. Xu, J.-S. Park, Y. Zheng, J. Balakrishnan, D. Im, T. Lei, Y.I. Song, Y.J. Kim, K.S. Kim, B. Özyilmaz, J.-H. Ahn, B.H. Hong, S. Iijima, 30-inch roll-based production of high-quality graphene films for flexible transparent electrodes. Mater. Sci. (2010). doi:arXiv:0912.5485 [cond-mat.mtrl-sci]. Forthcoming
D.B. Farmer, R. Golizadeh-Mojarad, V. Perebeinos, Y.-M. Lin, G.S. Tulevski, J.C. Tsang, P. Avouris, Chemical doping and electron  −  hole conduction asymmetry in graphene devices. Nano Lett. 9, 388–392 (2009). doi:10.1021/nl803214a
D.H. Chae, B. Krauss, K. von Klitzing, J.H. Smet, Hot phonons in an electrically biased graphene constriction. Nano Lett. 10, 466–471 (2010). doi:10.1021/nl903167f
M. Freitag, M. Steiner, Y. Martin, V. Perebeinos, Z. Chen, J.C. Tsang, P. Avouris, Energy dissipation in graphene field-effect transistors. Nano Lett. 9, 1883–1888 (2009). doi:10.1021/nl803883h
L. Berger, Emission of spin waves by a magnetic multilayer traversed by a current. Phys. Rev. B 54, 9353–9358 (1996)
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Welser, J., Wolf, S.A., Avouris, P., Theis, T. (2011). Applications: Nanoelectronics and Nanomagnetics. In: Nanotechnology Research Directions for Societal Needs in 2020. Science Policy Reports, vol 1. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-1168-6_9
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