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GaAs Quantum Well Wire Structures: Their Fabrication by Focused Ga Ion Beam Implantation and Their Optical Properties

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Physics and Technology of Submicron Structures

Part of the book series: Springer Series in Solid-State Sciences ((SSSOL,volume 83))

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Abstract

Interdiffusion of Al and Ga at the GaAs/AlGaAs heterointerface is enhanced by focused Ga ion beam implantation and subsequent annealing. Quantum well wire structures are fabricated using this interdiffusion enhancement resulting from focused Ga ion beam raster scanning. Fabricated structures reveal multiple fine structures in their low temperature photoluminescence and its excitation spectra. These multiple fine structures are considered to originate from the density of states specific to one-dimensional carrier systems.

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© 1988 Springer-Verlag Berlin Heidelberg

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Hirayama, Y., Okamoto, H. (1988). GaAs Quantum Well Wire Structures: Their Fabrication by Focused Ga Ion Beam Implantation and Their Optical Properties. In: Heinrich, H., Bauer, G., Kuchar, F. (eds) Physics and Technology of Submicron Structures. Springer Series in Solid-State Sciences, vol 83. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-83431-8_5

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  • DOI: https://doi.org/10.1007/978-3-642-83431-8_5

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-83433-2

  • Online ISBN: 978-3-642-83431-8

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