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Dry Etching: Concepts, Methods and Applications

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The Physics and Fabrication of Microstructures and Microdevices

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 13))

Abstract

The ever decreasing dimensions of modern ICs and the demand for increasing packing density of devices on Si chips is providing continued motivation to improve manufacturing techniques in VLSI fabrication and in particular to refine the lithographic processes. The requirement to conserve “real estate” on the chip demands that features must be placed very closely together which again requires excellent control over any pattern transfer process. Pattern transfer from the mask into the substrate can in principle be done by an additive process like lift-off or a subtractive process like etching. However since lift-off processes are rather difficult to be reproducibly executed in a manufacturing environment, most pattern transfer processes are performed today by etching. Over the past ten years we have seen a steady transition from traditional wet chemical etching to anisotropic dry etching.

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Author information

Authors and Affiliations

  1. Laboratories RCA Ltd., Badenerstr. 569, CH-8048, Zürich, Switzerland

    H. W. Lehmann

Authors
  1. H. W. Lehmann
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Editor information

Editors and Affiliations

  1. GEC Research Ltd., East Lane, HA9 7PP, Wembley, Middlesex, England

    Michael J. Kelly

  2. Laboratoire Central de Recherches, Thomson-CSF, F-91401, Orsay, France

    Claude Weisbuch

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© 1986 Springer-Verlag Berlin Heidelberg

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Lehmann, H.W. (1986). Dry Etching: Concepts, Methods and Applications. In: Kelly, M.J., Weisbuch, C. (eds) The Physics and Fabrication of Microstructures and Microdevices. Springer Proceedings in Physics, vol 13. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-71446-7_6

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  • DOI: https://doi.org/10.1007/978-3-642-71446-7_6

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-71448-1

  • Online ISBN: 978-3-642-71446-7

  • eBook Packages: Springer Book Archive

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