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MEMS Lorentz Force Magnetometers

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High Sensitivity Magnetometers

Part of the book series: Smart Sensors, Measurement and Instrumentation ((SSMI,volume 19))

Abstract

Lorentz force magnetometers based on microelectromechanical systems (MEMS) have several advantages such as small size, low power consumption, high sensitivity, wide dynamic range, high resolution, and low cost batch fabrication. These magnetometers have potential applications in biomedicine, navigation systems, telecommunications, automotive industry, space satellites, and non-destructive testing. This chapter includes the development of MEMS magnetometers composed by resonant structures that use the Lorentz force and different signal processing techniques. In addition, it presents the operation principle, sensing techniques, fabrication processes, applications, and challenges of MEMS magnetometers. Future applications will consider the integration of magnetometers with different devices (e.g., accelerometers, gyroscopes, energy harvesting and temperature sensors) on a single chip.

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Acknowledgments

This work was partially supported by Sandia National Laboratory’s University Alliance Program, FORDECYT-CONACYT through grant 115976, and projects PRODEP “Estudio de Dispositivos Electrónicos y Electromecánicos con Potencial Aplicación en Fisiología y Optoelectrónica” and “Sistema Electrónico de Medición de Campo Magnético Residual de Estructuras Ferromagnéticas”. The authors would like to thank Dr. Eduard Figueras of IMB-CNM (CSIC) for his collaboration into the fabrication of MEMS magnetometers and B.S. Fernando Bravo-Barrera of LAPEM for his assistance with the SEM images.

Author information

Authors and Affiliations

  1. Micro and Nanotechnology Research Center, Universidad Veracruzana, Calzada Ruiz Cortines 455, 94294, Boca Del Rio, VER, Mexico

    Agustín Leobardo Herrera-May

  2. Engineering Faculty, Universidad Veracruzana, Calzada Ruiz Cortines 455, 94294, Boca Del Rio, VER, Mexico

    Francisco López-Huerta

  3. Depto. Ingeniería Mecánica, DICIS, Universidad de Guanajuato, Carretera Salamanca-Valle de Santiago 3.5 + 1.8 Km, 36885, Salamanca, GTO, Mexico

    Luz Antonio Aguilera-Cortés

Authors
  1. Agustín Leobardo Herrera-May
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  2. Francisco López-Huerta
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  3. Luz Antonio Aguilera-Cortés
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Correspondence to Agustín Leobardo Herrera-May .

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Editors and Affiliations

  1. Ben-Gurion University of the Negev , Beer-Sheva, Israel

    Asaf Grosz

  2. Northern Illinois University, DeKalb, Illinois, USA

    Michael J. Haji-Sheikh

  3. Massey University (Manawatu), Palmerston North, New Zealand

    Subhas C. Mukhopadhyay

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Herrera-May, A.L., López-Huerta, F., Aguilera-Cortés, L.A. (2017). MEMS Lorentz Force Magnetometers. In: Grosz, A., Haji-Sheikh, M., Mukhopadhyay, S. (eds) High Sensitivity Magnetometers. Smart Sensors, Measurement and Instrumentation, vol 19. Springer, Cham. https://doi.org/10.1007/978-3-319-34070-8_9

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  • DOI: https://doi.org/10.1007/978-3-319-34070-8_9

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