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Scanning Probe Based Nanolithography and Nanomanipulation on Graphene

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Tip-Based Nanofabrication

Abstract

Alternative lithographic techniques, in particular those based on scanning probe microscopy, have shown a great potential for fabricating nanostructures using various material and allowing high spatial resolution, alignment capabilities and high-resolution imaging during the different lithographic steps. More specifically, atomic force microscope (AFM) and scanning tunneling microscope (STM) have been in the recent past employed to image and modify at nanometer scale a new carbon material discovered in 2004 and called graphene, a single layer of carbon atoms arranged in a honeycomb crystal lattice. In this chapter a review of recent results obtained by scanning probe based nanofabrication on graphene nanostructures is presented. It is focused in particular on nanomanipulation, local anodic oxidation (LAO), electrochemical or thermal-stimulated desorption, static or dynamic ploughing as well as other AFM and STM based techniques on imaging, lithography and spectroscopy.

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Abbreviations

AFM:

Atomic force microscope

dI/dU, dI/dV:

Differential conductance

FLG:

Few layer graphene

GNR:

Graphene nano ribbons

GO:

Graphene oxide

GOepi :

Graphene oxide epitaxial

I-V:

Current-Voltage

KPM:

Kelvin probe microscopy

LAO:

Local anodic oxidation

LDOS:

Local density of states

NEMS:

Nano electro mechanical systems

SEM:

Scanning electron microscope

SGM:

Scanning gate microscopy

SLG:

Single layer graphene

SPL:

Scanning probe lithography

SPM:

Scanning probe microscopy

SPN:

Scanning probe nanomanipulation

SPS:

Scanning probe spectroscopy

STM:

Scanning tunneling microscope

TCNL:

Thermo chemical nano lithography

TERS:

Tip enhanced Raman scattering

UHV:

Ultra high vacuum

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  1. Laboratorio NEST, Scuola Normale Superiore, I-56127, Pisa, Italy

    Pasqualantonio Pingue

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  1. Dept. Mechanical &, Aerospace Engineering, Arizona State University, Tempe, Arizona, USA

    Ampere A. Tseng

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Pingue, P. (2011). Scanning Probe Based Nanolithography and Nanomanipulation on Graphene. In: Tseng, A. (eds) Tip-Based Nanofabrication. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-9899-6_10

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