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One possibility of mathematically modeling the thermal effect of a finely focused electron beam on a homogeneous semiconductor

  • Proceedings of the VI International Conference “Crystal Physics and the Deformation Behavior of Promising Materials”
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Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

The problem of heat distribution in materials irradiated with finely focused medium-energy electron beams is considered by means of mathematical simulation. A model is developed by solving a multidimensional heat-transfer steady equation using the Green function. A model that can be applied to a broad class of solid bodies and the range of energies of primary electrons is used as the source function. Some results are illustrated using the example of semiconductor materials used in electronics.

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Authors and Affiliations

  1. Tsiolkovskii Kaluga State University, Kaluga, 248023, Russia

    A. N. Amrastanov & M. A. Stepovich

  2. Bauman State Technical University, Kaluga branch, Kaluga, 248004, Russia

    S. A. Ginzgeymer

  3. Plekhanov Russian University of Economics, Ivanovo branch, Ivanovo, 153002, Russia

    M. A. Stepovich

  4. Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences, Moscow, 117901, Russia

    M. N. Filippov

Authors
  1. A. N. Amrastanov
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  2. S. A. Ginzgeymer
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  3. M. A. Stepovich
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  4. M. N. Filippov
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Corresponding author

Correspondence to A. N. Amrastanov.

Additional information

Original Russian Text © A.N. Amrastanov, S.A. Ginzgeymer, M.A. Stepovich, M.N. Filippov, 2016, published in Izvestiya Rossiiskoi Akademii Nauk, Seriya Fizicheskaya, 2016, Vol. 80, No. 10, pp. 1448–1452.

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Amrastanov, A.N., Ginzgeymer, S.A., Stepovich, M.A. et al. One possibility of mathematically modeling the thermal effect of a finely focused electron beam on a homogeneous semiconductor. Bull. Russ. Acad. Sci. Phys. 80, 1290–1294 (2016). https://doi.org/10.3103/S1062873816100038

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  • DOI: https://doi.org/10.3103/S1062873816100038

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