Abstract
The problem of heat distribution in semiconductor materials irradiated by finely focused electron beams with no exchange of heat between the target and environment is investigated by means of mathematical modeling. In quantitatively describing the energy loss of probe electrons, a model applicable to a wide range of solids and primary electron energies is used that describes separately the contributions from absorbed and backscattered electrons to the energy dissipated in the target. The nonmonotonic dependence of the maximum target heating temperature on the primary electron energy is explained using aspects of the proposed approach. Some results are illustrated using the example of semiconductor electronic materials.
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References
Scanning Microscopy for Nanotechnology. Techniques and Applications, Zhou, W. and Wang, Z.L., Eds., New York: Springer, 2007.
Stepovich, M.A., Doctoral (Phys.–Math.) Dissertation, Moscow: Bauman Moscow State Technical Univ., 2003.
Rau, E.I., Ditsman, S.A., Zaitsev, S.V., Lermontov, N.V., Luk’yanov, A.E., and Kupreenko, S.Yu., Bull. Russ. Acad. Sci.: Phys., 2013, vol. 77, no. 8, p. 951.
Amrastanov, A.N., Kuzin, A.Yu., Mityukhlyaev, V.B., Seregina, E.V., Stepovich, M.A., Todua, P.A., and Filippov, M.N., Meas. Tech., 2017, vol. 60, no. 6, p. 534.
Moss, T.S., Burrel, G.J., and Ellis, B., Semiconductor Opto-Electronics, Butterworth-Heinemann, 1972.
Mikheev, N.N., Petrov, V.I., and Stepovich, M.A., Bull. Acad. Sci. USSR. Phys. Ser., 1991, vol. 55, no. 8, p. 1.
Mikheev, N.N. and Stepovich, M., Ind. Lab., 1996, vol. 62, no. 4, p. 221.
Gvozdover, R.S., Petrov, V.I., Podtyazhkin, E.Ya., Stepovich, M.A., and Filippov, M.N., Izv. Akad. Nauk SSSR. Ser. Fiz., 1984, vol. 48, no. 12, p. 2378.
Dyukov, V.G., Nepiiko, S.A., and Sedov, N.N., Elektronnaya mikroskopiya lokal’nykh potentsialov (Electron Microscopy of Local Potentials), Kiev: Naukova Dumka, 1991.
Makarov, V.V., Zh. Tekh. Fiz., 1978, vol. 48, no. 5, p. 551.
Microanalysis and Scanning Electron Microscopy, Maurice, F., Meny, L., and Tixier, R., Eds., Les Editions De Physique, 1979.
Practical Scanning Electron Microscopy: Electron and Ion Microprobe Analysis, Goldstein, J. and Yakowitz, H., Eds., Plenum, 1975.
Ryazanov, M.I. and Tilinin, I.S., Issledovanie poverkhnosti po obratnomu rasseyaniyu chastits (Surface Analysis by Particle Backscattering), Moscow: Energoatomizdat, 1985.
Fizicheskie osnovy rentgenospektral’nogo lokal’nogo analiza (Physical Foundations of X-Ray Electron Probe Analysis), Borovskii, I.B., Ed., Moscow: Nauka, 1973.
Konnikov, S.G. and Sidorov, A.F., Elektronnozondovye metody issledovaniya poluprovodnikovykh materialov i priborov (Electron Probe Methods for Analysis of Semiconductor Materials and Devices), Moscow: Energiya, 1978.
Borovskii, I.B., Vodovatov, F.F., Zhukov, A.A., and Cherepin, V.T., Lokal’nye metody analiza materialov (Electron Probe Analysis of Materials), Moscow: Metallurgiya, 1973.
Filippov, M.N., Izv. Ross. Akad. Nauk. Ser. Fiz., 1993, no. 8, p. 163.
Amrastanov, A.N., Ginzgeymer, S.A., Stepovich, M.A., and Filippov, M.N., Bull. Russ. Acad. Sci.: Phys., 2016, vol. 80, no. 10, p. 1290.
Tikhonov, A.N. and Samarskii, A.A., Uravneniya matematicheskoi fiziki (Equations of Mathematical Physics), Moscow: Mosk. Gos. Univ., 1999.
Bogolyubov, A.N., Levashova, N.T., Mogilevskii, I.E., Mukhartova, Yu.V., and Shapkina, N.E., Funktsiya Grina operatora Laplasa. Uchebnoe posobie (Green Function of the Laplacian Operator. Textbook), Moscow: Mosk. Gos. Univ., 2012.
Levich, V.G., Kurs teoreticheskoi fiziki (Theoretical Physics), Moscow: Fizmatgiz, 1962, vol. 1.
Levich, V.G., Kurs teoreticheskoi fiziki (Theoretical Physics), Moscow: Fizmatgiz, 1962, vol. 2.
Lifshitz, E.M. and Pitaevskii, L.P., Fizicheskaya kinetika (Physical Kinetics), Moscow: Nauka, 1979.
Sobol’, I.M., Chislennye metody Monte-Karlo (Numerical Monte Carlo Methods), Moscow: Nauka, 1973.
Lebed’, V.I. and Afonin, V.P., in Rentgenovskaya i elektronnaya spektroskopiya (X-Ray and Electron Spectroscopy), Chernogolovka: Inst. Fiz. Tverdogo Tela, 1985, p. 29.
Joy, D.C., Monte Carlo Modeling for Electron Microscopy and Microanalysis, Oxford Univ. Press, 1995.
Kanaya, K. and Okayama, S., J. Phys. D, 1972, vol. 5, no. 1, p. 43.
Babichev, A.P., Babushkina, N.A., Bratkovskii, A.M., et al., Fizicheskie velichiny: Spravochnik (Physical Quantities: Handbook), Grigor’ev, I.S. and Meilikhov, E.Z., Eds., Moscow: Energoatomizdat, 1991.
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Original Russian Text © A.N. Amrastanov, E.V. Seregina, M.A. Stepovich, 2018, published in Izvestiya Rossiiskoi Akademii Nauk, Seriya Fizicheskaya, 2018, Vol. 82, No. 9, pp. 1304–1309.
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Amrastanov, A.N., Seregina, E.V. & Stepovich, M.A. Aspects of Modeling the Electron Probe Heating of a Semiconductor Target. Bull. Russ. Acad. Sci. Phys. 82, 1187–1192 (2018). https://doi.org/10.3103/S1062873818090034
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DOI: https://doi.org/10.3103/S1062873818090034