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Determination of optical constants of thin dielectric films using the spectral transmission coefficient

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Abstract

Based on the developed analytical description of the transmission spectrum in the visible range for a sample weakly absorbing film-transparent substrate, a technique for calculating the optical constants and thickness of simple metal oxides has been proposed. The capabilities of the calculation technique are demonstrated for an X-ray-amorphous film of tungsten oxide.

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Authors and Affiliations

  1. Ul’yanov (Lenin) St. Petersburg State Electrotechnical University LETI, ul. Prof. Popova 5, St. Petersburg, 197376, Russia

    V. I. Shapovalov & A. A. Morozova

  2. Grebenshchikov Institute of Silicate Chemistry, Russian Academy of Sciences, nab. Makarova 2, St. Petersburg, 199034, Russia

    A. E. Lapshin

Authors
  1. V. I. Shapovalov
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  2. A. A. Morozova
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  3. A. E. Lapshin
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Correspondence to V. I. Shapovalov.

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Original Russian Text © V.I. Shapovalov, A.A. Morozova, A.E. Lapshin, 2014, published in Fizika i Khimiya Stekla.

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Shapovalov, V.I., Morozova, A.A. & Lapshin, A.E. Determination of optical constants of thin dielectric films using the spectral transmission coefficient. Glass Phys Chem 40, 341–345 (2014). https://doi.org/10.1134/S1087659614030195

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  • DOI: https://doi.org/10.1134/S1087659614030195

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