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Structure, composition, and physicomechanical characteristics of HfB2 and Hf-B-N films

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Abstract

The paper deals with the study of the effect of the deposition conditions (the bias potential and substrate temperature) on the structure, composition, and physicomechanical characteristics of nanocrystalline films of hafnium diboride and boridonitride formed by the method of nonreactive (in Ar) and reactive (in Ar + N2) HF magnetron sputtering, respectively. The optimal conditions for the deposition of the hafnium diboride coatings with growth texture in plane (00.1) and the best physicomechanical characteristics are deter-mined. It is shown that at a bias potential of ±50 V and a substrate temperature of ∼500°C superstoichiometric highly textured films are formed with a nanohardness of 44 GPa and an elastic modulus of 396 ± 11 GPa. A relation between the composition, structure, and physicomechanical characteristics of the films is found. Reactive sputtering in (Ar + N2) makes it possible to produce amorphous-crystalline films of the composite (HfB2 + BN) that consists of grains of the HfB2 nanocrystalline phase, the spaces between which are filled with the amorphous phase of graphite-like BN.

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References

  1. P. H. Mayrhofer, C. Mitterer, and J. Musil, “Structure-Property Relationships in Single and Dual Phase Nanocrystalline Hard Coatings,” Surf. Coat. Techn. 174, 725–731 (2003).

    Article  Google Scholar 

  2. F. Kunc, J. Musil, P. H. Mayrhofer, and C. Mitterer, “Low-Stress Superhard Ti-B Films Prepared by Magnetron Sputtering,” Surf. Coat. Techn. 175, 744–753 (2003).

    Article  Google Scholar 

  3. W. Herr and E. Brozseit, “The Influence of a Heat Treatment on the Microstructure and Mechanical Properties of Sputtered Coatings,” Surf. Coat. Techn. 97, 335–340 (1997).

    Article  CAS  Google Scholar 

  4. P. H. Mayrhoffer and M. Stoiber, “Thermal Stability of Superhard Ti-B-N Coatings,” Surf. Coat. Techn. 201, 6148–6153 (2007).

    Article  Google Scholar 

  5. P. H. Mayrhofer, C. Mitterer, J. G. Wen, J. E. Greene, and I. Petrov, “Structural Mechanical, Thermodynamic and Optical Properties of Condensed Material,” Appl. Phys. Lett. 86, 131909–131911 (2005).

    Article  Google Scholar 

  6. R. A. Andrievskii, G. V. Kalinnikov, N. P. Kobelev, Ya.M. Soifer, and D. V. Shtanskii, “Structure and Physicomechanical Properties of Nanocrystalline Boride-Nitride Films,” Phys. Solid State 39, 1661–1666 (1997).

    Article  Google Scholar 

  7. R. A. Andrievskii, G. V. Kalinnikov, and D. V. Shtanskii, “High-Resolution Transmission and Scanning Electron Microscopy of Boride-Nitride Nanostructured Films,” Phys. Solid State 42, 760–766 (2000).

    Article  CAS  Google Scholar 

  8. G. V. Kalinnikov, R. A. Andrievskii, V. N. Kopylov, and D. Louzguine, “Properties of Nanostructured and Amorphous Films in the TiB2-B4C System,” Phys. Solid State 50, 374–378 (2008).

    Article  CAS  Google Scholar 

  9. O. V. Sobol’, O. N. Grigor’ev, S. N. Dub, A. N. Stetsenko, and A. A. Podtelezhnikov, “Peculiarities of the Phase Composition, Structure, Stressed State, and Mechanical Characteristics of Triode Sputtered Condensates of the W-Ti-B Boride System,” J. Superhard Mater., 27(5), 38–47 (2005).

    Google Scholar 

  10. S. N. Dub, O. N. Grigoryev, O. V. Sobol, A. N. Stetsenko, and A. A. Podtelezhnikov, “The Effect of Structure on Mechanical Properties of TiB2-W2B5 Nanocrystalline Coating,” Funct. Mater. 13(1), 105–111 (2006).

    Google Scholar 

  11. S. Jayaraman, J. E. Gerbi, Y. Yang, D. Y. Kim, A. Chatterjee, P. Bellon, G. S. Girolami, J. P. Chevalier, and J. R. Abelson, “HfB2 and Hf-B-N Hard Coatings by Chemical Vapor Deposition,” Surf. Coat. Technol. 200, 6629–6633 (2006).

    Article  CAS  Google Scholar 

  12. W. C. Oliver and G. M. Pharr, “An Improved Technique for Determining Hardness and Elastic Modulus Using Load and Displacement Sensing Indentation Experiments,” J. Mater. Res. 7, 1564–1583 (1992).

    Article  CAS  Google Scholar 

  13. A. A. Goncharov, V. A. Konovalov, S. N. Dub, V. A. Stupak, and V. V. Petukhov, “Structure, Composition, Physical, and Mechanical Characteristics of Tantalum Diboride Films,” Phys. Met. Metallogr. 107, 285–290 (2009).

    Article  Google Scholar 

  14. A. A. Goncharov, V. A. Konovalov, and V. A. Stupak, Effect of Bias Voltage on the Structure of Thin Tantalum Boride Films,” Tech. Phys. Lett. 33, 190–191 (2007).

    Article  CAS  Google Scholar 

  15. A. A. Goncharov, V. V. Petukhov, S. N. Dub, and V. A. Konovalov, “Structure, Electrophysical, and Mechanical Properties of Ta-B-N Films,” Phys. Met. Metallogr. 105, 362–367 (2008).

    Article  Google Scholar 

  16. S. N. Dub, A. A. Goncharov, and V. V. Petukhov, “Effect of Nitrogen on Mechanical Properties of Thin Films of the Ta-B-N System,” J. Superhard Mater., 31, 71–77 (2009).

    Article  Google Scholar 

  17. K. L. Dahm, L. R. Jordan, J. Huase, and P. A. Deanuley, “Magnetron Sputtering Deposition of Chromium Diboride Coatings,” Surf. Coat. Technol. 108–109, 413–418 (1998).

    Article  Google Scholar 

  18. W. G. Fahrenholtz, G. E. Hilmas, G. Inna, and J. A. Zaykoski, “Refractory Diborides of Zirconium and Hafnium,” J. Am. Ceram. Soc. 90, 1347–1364 (2007).

    Article  CAS  Google Scholar 

  19. A. A. Goncharov, V. A. Konovalov, G. K. Volkova, and V. A. Stupak, “Size Effect on the Structure of Nanocrystalline and Cluster Films of Hafnium Diboride,” Phys. Met. Metallogr. 108, 368–373 (2009).

    Article  Google Scholar 

  20. A. A. Goncharov, A. V. Agulov, V. V. Petukhov, and V. A. Stupak, “Structure and Composition of Hafnium Diboride Films,” Inorg. Mater. 47, 592–596 (2011).

    Article  CAS  Google Scholar 

  21. C. Mitterer, M. Rauter, and P. Roadhammer, “Sputter Deposition of Ultrahard Coatings within the System Ti-B-C-N,” Surf. Coat. Technol. 41, 351–355 (1990).

    Article  CAS  Google Scholar 

  22. V. T. Cherepin and M. A. Vasil’ev, Secondary Ion Emission in Metals and Alloys (Naukova Dumka, Kiev, 1975) [in Russian].

    Google Scholar 

  23. D. B. Shtansky, S. A. Kulinich, E. A. Levashov, A. N. Shveiko, and J. J. More, “Localized Deformation of Multicomponent Thin Films,” Thin Solid Films 420–421, 105–111 (2002).

    Google Scholar 

  24. D. V. Shtanskii, S. A. Kulinich, E. A. Levashov, and J. J. More, “Structure and Physical-Mechanical Properties of Nanostructured Thin Films,” Phys. Solid State 45, 1177–1184 (2003).

    Article  CAS  Google Scholar 

  25. R. A. Andrievskii and I. I. Spivak, Strength of Refractory Compounds and Related Materials (A Handbook) (Metallurgiya, Chelyabinsk, 1989) [in Russian].

    Google Scholar 

  26. A. A. Goncharov, “Mechanism of Formation of the Columnar Structure in Films of Transition Metal Diborides,” Phys. Solid State 50, 168–172 (2008).

    Article  CAS  Google Scholar 

  27. L. I. Gladkikh, O. N. Grigor’ev, O. V. Sobol’, A. T. Pugachev, E. A. Sobol’, and S. V. Martynyuk, “Structure and Hardness of TiB2-CrB2 and TiB2-W2B5 Composition Ceramics,” Vopr. Atom. Nauki Tekh., Ser. Fiz. Rad. Povrezhd. Rad. Mater., No. 6, 139–142 (2002).

  28. A. M. Glezer, “Amorphous and Nanocrystalline Structures: Similarity, Distinctions, Mutual Transitions,” Ross. Khim. Zh. 45(5), 57–63 (2002).

    Google Scholar 

  29. B. A. Movchan and A. V. Demchishin, “Study of Structure and Properties of Bulk Vacuum Condensates of Nickel, Tungsten, Aluminum Oxide, and Zirconium Dioxide,” Fiz. Met. Metalloved. 28, 653–660 (1969).

    CAS  Google Scholar 

  30. S. N. Dub, A. A. Goncharov, S. S. Ponomarev, V. B. Filippov, G. N. Tolmacheva, and A. V. Agulov, “Mechanical Properties of HfB2.7 Nanocrystalline Thin Films,” J. Superhard Mater., 33, 151–158 (2011).

    Article  Google Scholar 

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Authors and Affiliations

  1. Donbass State Academy of Machine Building, Kramatorsk, Donetsk Region, 83013, Ukraine

    A. A. Goncharov & A. V. Agulov

  2. Bakul’ Institute of Superhard Materials, National Academy of Sciences of Ukraine, ul. Avtozavodskaya 2, Kiev, 04074, Ukraine

    S. N. Dub

Authors
  1. A. A. Goncharov
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  2. S. N. Dub
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  3. A. V. Agulov
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Correspondence to A. A. Goncharov.

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Original Russian Text © A.A. Goncharov, S.N. Dub, A.V. Agulov, 2013, published in Fizika Metallov i Metallovedenie, 2013, Vol. 114, No. 1, pp. 105–112.

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Goncharov, A.A., Dub, S.N. & Agulov, A.V. Structure, composition, and physicomechanical characteristics of HfB2 and Hf-B-N films. Phys. Metals Metallogr. 114, 95–101 (2013). https://doi.org/10.1134/S0031918X12110063

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  • DOI: https://doi.org/10.1134/S0031918X12110063

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