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An on-chip near-field terahertz probe and detector

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Abstract

The advantageous properties of terahertz waves, such as their transmission through objects opaque to visible light, are attracting attention for imaging applications1,2. A promising approach for achieving high spatial resolution is the use of near-field imaging3,4. Although this method has been well established in the visible5,6 and microwave7,8 regions, it is challenging to perform in the terahertz region. In the terahertz techniques investigated to date9,10,11, detectors have been located remotely from the probe, which degrades sensitivity, and the influence of far-field waves is unavoidable. Here we present a new integrated detection device for terahertz near-field imaging in which all the necessary detection components—an aperture, a probe and a terahertz detector—are integrated on one semiconductor chip, which is cryogenically cooled. This scheme allows highly sensitive, high-resolution detection of the evanescent field alone and promises new capabilities for high-resolution terahertz imaging.

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Figure 1: Detector-integrated THz–NI device.
Figure 2: Numerical analysis of the THz electric-field distribution.
Figure 3: THz transmission signal as a function of the THz-NI device position.
Figure 4: Evaluation of the spatial resolution of the THz-NI device.

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References

  1. Ferguson, B. & Zhang, X.-C. Materials for terahertz science and technology. Nature Mater. 1, 26–33 (2002).

    Article  ADS  Google Scholar 

  2. Tonouchi, M. Cutting-edge terahertz technology. Nature Photonics 1, 97–105 (2007).

    Article  ADS  Google Scholar 

  3. Pohl, D. W. Scanning near-field optical microscopy. Advances in Optical and Electron Microscopy (eds Mulvey, T. & Sheppard, C. J. R.) (Academic, San Diego, 1991).

    Google Scholar 

  4. Paesler, M. A. & Moyer, P. J. Near-Field Optics (Wiley, New York, 1996).

    Google Scholar 

  5. Saiki, T., Mononobe, S., Ohtsu, M., Saito, N. & Kusano, J. Tailoring a high-transmission fibre probe for photon scanning tunnelling microscope. Appl. Phys. Lett. 68, 2612–2614 (1996).

    Article  ADS  Google Scholar 

  6. Zenhausern, F., Martin, Y. & Wickramasinghe, H. K. Scanning interferometric apertureless microscopy: Optical imaging at 10 angstrom resolution. Science 269, 1083–1085 (1995).

    Article  ADS  Google Scholar 

  7. Symons, W. C. III., Whites, K. W. & Lodder, R. A. Theoretical and experimental characterization of a near-field scanning microwave microscope (NSMM). IEEE Trans. Microwave Theory Tech. 51, 91–99 (2003).

    Article  ADS  Google Scholar 

  8. Tabib-Azar, M. & Wang, Y. Design and fabrication of scanning near-field microwave probes compatible with atomic force microscopy to image embedded nanostructures. IEEE Trans. Microwave Theory Tech. 52, 971–979 (2004).

    Article  ADS  Google Scholar 

  9. Hunsche, S., Koch, M., Brener, I. & Nuss, M. C. THz near-field imaging. Opt. Commun. 150, 22–26 (1998).

    Article  ADS  Google Scholar 

  10. van der Valk, N. C. J. & Planken, P. C. M. Electro-optic detection of subwavelength terahertz spot sizes in the near field of a metal tip. Appl. Phys. Lett. 81, 1558–1560 (2002).

    Article  ADS  Google Scholar 

  11. Chen, H.-T., Kersting, R. & Cho, G. C. Terahertz imaging with nanometer resolution. Appl. Phys. Lett. 83, 3009–3011 (2003).

    Article  ADS  Google Scholar 

  12. Ohtsu, M. (ed.) Near-Field Nano/Atom Optics and Technology (Springer-Verlag, Berlin, 1998).

    Book  Google Scholar 

  13. Kawano, Y., Hisanaga, Y., Takenouchi, H. & Komiyama, S. Highly sensitive and tunable detection of far-infrared radiation by quantum Hall devices. J. Appl. Phys. 89, 4037–4048 (2001).

    Article  ADS  Google Scholar 

  14. Kawaguchi, Y., Hirakawa, K., Saeki, M., Yamanaka, K. & Komiyama, S. Performance of high-sensitivity quantum Hall far-infrared photodetectors. Appl. Phys. Lett. 80, 136–138 (2002).

    Article  ADS  Google Scholar 

  15. Stellmach, C. et al. Time- and spectrally resolved terahertz photoconductivity of quantum Hall systems. Phys. Rev. B 76, 035341 (2007).

    Article  ADS  Google Scholar 

  16. Bethe, H. A. Theory of diffraction by small holes. Phys. Rev. 66, 163–182 (1944).

    Article  ADS  MathSciNet  Google Scholar 

  17. Fuse, T., Kawano, Y., Suzuki, M., Aoyagi, Y. & Ishibashi, K. Coulomb peak shifts under terahertz-wave irradiation in carbon nanotube single-electron transistors. Appl. Phys. Lett. 90, 013119 (2007).

    Article  ADS  Google Scholar 

  18. Mori, T. et al. Improved temperature characteristics of single-wall carbon nanotube single electron transistors using CMC dispersant. Appl. Phys. Lett. 91, 263511 (2007).

    Article  ADS  Google Scholar 

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Acknowledgements

We acknowledge support from Japan Science and Technology Agency.

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Y.K. performed the experimental work, calculations and project planning. K.I. dealt with wafer supply.

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Correspondence to Yukio Kawano.

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Kawano, Y., Ishibashi, K. An on-chip near-field terahertz probe and detector. Nature Photon 2, 618–621 (2008). https://doi.org/10.1038/nphoton.2008.157

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  • DOI: https://doi.org/10.1038/nphoton.2008.157

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