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Thermodynamic Estimation of Silicon Tetrachloride to Trichlorosilane by a Low Temperature Hydrogenation Technique

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Abstract

The chemical reactions in the SiCl4-Si-H2 system using a low temperature hydrogenation technique related to the Siemens process were studied based on thermodynamics. The diagrams of standard Gibbs free energy of formation and equilibrium constants for seven reactions used as a function of temperature in this system were calculated and plotted for a temperature range of 473 K to 1073 K. It showed that the lower the temperature, the larger the conversion ratio of SiCl4. The equilibrium composition of gaseous species in the SiCl4-Si-H2 system with different initial SiCl4/H2 ratio and systematic pressure was calculated and the corresponding conversion ratio of SiCl4 was obtained. The conversion ratio was improved by increasing the initial ratio of H2 in raw materials and the systematic pressure but was reduced with the increase of temperature. The conversion ratio of SiCl4 reached 0.41 with an initial SiCl4/H2 ratio of 1/5 and a systematic pressure of 5 MPa at 473 K.

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Authors and Affiliations

  1. State Key Laboratory of Complex Nonferrous Metal Resources Clean Utilization/The National Engineering Laboratory for Vacuum Metallurgy, Kunming University of Science and Technology, Kunming, 650093, People’s Republic of China

    Jijun Wu, Wenhui Ma & Yongnian Dai

  2. Engineering Research Center for Silicon Metallurgy and Silicon Materials of Yunnan Provincial Universities/Faculty of Metallurgical and Energy Engineering, Kunming University of Science and Technology, Kunming, 650093, People’s Republic of China

    Jijun Wu, Zhengjie Chen, Wenhui Ma & Yongnian Dai

Authors
  1. Jijun Wu
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  2. Zhengjie Chen
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  3. Wenhui Ma
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  4. Yongnian Dai
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Correspondence to Jijun Wu or Wenhui Ma.

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Wu, J., Chen, Z., Ma, W. et al. Thermodynamic Estimation of Silicon Tetrachloride to Trichlorosilane by a Low Temperature Hydrogenation Technique. Silicon 9, 69–75 (2017). https://doi.org/10.1007/s12633-015-9353-0

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  • DOI: https://doi.org/10.1007/s12633-015-9353-0

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