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Experimental Study on the Photoelastic Coefficient and Its Wavelength Dispersion for Quantitative Imaging of Residual Strain in Commercial SiC Substrates

  • Topical Collection: 19th Conference on Defects (DRIP XIX)
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Abstract

The absolute difference between two photoelastic coefficients \(\left| {p_{11} - p_{12} } \right|\) and its wavelength dispersion have been experimentally studied in commercially available (0001) 4H silicon carbide substrates by using originally developed imaging polariscopes (xIPs) with different light-source wavelengths (\(\lambda\) = 630 nm, 940 nm, and 1200 nm). The simple three-point bending test was adopted to measure the distribution of birefringence \(\left| {\Delta {\text{n}}} \right|\) in a small beam under an external load. Additionally, numerical simulation was performed to accurately estimate the distribution of \(\left| {\sigma_{1} - \sigma_{2} } \right|\) in the beam, even with its size restriction. The value of \(\left| {p_{11} - p_{12} } \right|\) was evaluated by regression analysis on the value pairs of \(\left| {\sigma_{1} - \sigma_{2} } \right|\) and \(\left| {\Delta {\text{n}}} \right|\) examined under various external loads. In order to avoid the effect of residual strain in the sample, the regression analysis was performed at many positions over the sample rather than a few representative points as is adopted conventionally. The value of \(\left| {p_{11} - p_{12} } \right|\) was obtained as 0.040, 0.090 and 0.13 at wavelengths of 630 nm, 940 nm, and 1200 nm, respectively. The wavelength dispersion revealed inverse correlation with photon energy and suggested that \(\left| {p_{11} - p_{12} } \right|\) may become close to zero at a certain wavelength shorter than 630 nm, implying a technical trade-off between the sensitivity of the photoelastic effect and the signal-to-noise ratio in polariscopic photometry, which is useful for considering the optimal wavelength in quantitative strain imaging with photoelastic technique.

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References

  1. T. Kimoto, J. A. Cooper, Fundamentals of Silicon Carbide Technology, (Wiley-IEEE Press, 2014).

  2. P. Friedrichs, T. Kimoto, L. Ley, G. Pensl, (ed.), Silicon Carbide: Volume 1 (Wiley-VCH, 2009).

  3. P. Friedrichs, T. Kimoto, L. Ley, G. Pensl, (ed.), Silicon Carbide: Volume 2 (Wiley-VCH, 2009).

  4. M. Fukuzawa, and K. Kanamoto, Photoelastic characterization of residual strain distribution in commercial off-axis SiC substrates. J. Electronic Mater. 49, 5161 (2020).

    Article  CAS  Google Scholar 

  5. M. Fukuzawa, and M. Yamada, Quantitative imaging of residual strain profile in large diameter GaAs substrates. Phys. Status Solidi (c) 5, 2941 (2008).

    Article  CAS  Google Scholar 

  6. M. Fukuzawa and M. Yamada, In Proc. of IPRM2008 (2008), TuB.1–1-Inv.

  7. T. Kato, H. Ohsato, A. Okamoto, N. Sugiyama, and T. Okuda, The photoelastic constant and internal stress around micropipe defects of 6H-SiC single crystal. Mater. Sci. Eng. B 57, 147 (1999).

    Article  Google Scholar 

  8. S.Y. Davydov, and S.K. Tikhonov, Photoelasticity and quadratic permittivity of wide-gap semiconductors. Semiconductors 31, 698 (1997).

    Article  Google Scholar 

  9. M. Herms, G. Irmer, S. Spira, and M. Wagner, The photoelastic constant of (0001) 4H silicon carbide determined by scanning infrared polariscopy. Phys. Status Solidi A 218, 2100198 (2021).

    Article  CAS  Google Scholar 

  10. J.F. Nye, Physical Properties of Crystals (London: Oxford Unversity Press, 1957).

    Google Scholar 

  11. K. Kamitani, M. Grimsditch, J.C. Nipko, C.-K. Loong, M. Okada, and I. Kimura, The elastic constants of silicon carbide: a Brillouin-scattering study of 4H and 6H SiC single crystals. J. Appl. Phys. 82, 3152 (1997).

    Article  CAS  Google Scholar 

  12. C. Xu, S. Wang, G. Wang, J. Liang, S. Wang, L. Bai, J. Yang, and X. Chen, Temperature dependence of refractive indices for 4H- and 6H-SiC. J. Appl. Phys. 115, 113501 (2014).

    Article  Google Scholar 

  13. S. Adachi, Properties of Group-IV, III-V and II-VI Semiconductors (Chichester: John Wiley & Sons, 2005), p.285.

    Book  Google Scholar 

Download references

Acknowledgments

This work was supported by JSPS KAKENHI Grant Number JP17K05040.

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Correspondence to Masayuki Fukuzawa.

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Fukuzawa, M., Kudo, N. Experimental Study on the Photoelastic Coefficient and Its Wavelength Dispersion for Quantitative Imaging of Residual Strain in Commercial SiC Substrates. J. Electron. Mater. 52, 5172–5177 (2023). https://doi.org/10.1007/s11664-023-10473-z

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  • DOI: https://doi.org/10.1007/s11664-023-10473-z

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