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UV absorption characteristics and element composition of (200) and (111) orientation cubic MgZnO thin films deposited at different temperature by PLD method

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Abstract

Cubic structure MgZnO thin films were made on fused quartz substrate at different temperature by PLD method, the preferred orientation of MgZnO thin films changed from (200) to (111) when growth temperature increased because of different substrate surface situation. MgZnO thin film deposited more along (200) orientation at 300 °C with narrower band gap because it contain more Zn atoms in MgZnO lattice than the ones deposited at other temperature, and the UV absorption edge of which is located in longer wavelength position. MgZnO thin film deposited more along (111) orientation at 700 °C with better crystal quality than the ones deposited at other temperature, but the band gap of this sample is wider than the other ones though it also contain more Zn atoms in MgZnO lattice as the one deposited at 300 °C, which is reason from the function of much lower grain boundary density in this MgZnO thin film.

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Acknowledgments

This work was supported by the National Natural Science Foundation of China under Grant Nos. 60976036, 51302174, 51371120. The Science and Technology Research Items of Shenzhen,Natural Science Foundation of SZU (Grant No. 201201) and the Items of Shenzhen Key Laboratory of Special Functional Materials (Grant Nos. T201205, T201101 and T201109).

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Authors and Affiliations

  1. Shenzhen Key Laboratory of Special Functional Materials, Shenzhen Engineering Laboratory for Advanced Technology of Ceramics, College of Materials Science and Engineering, Shenzhen University, Shenzhen, 518060, China

    S. Han, S. Peng, Y. M. Lu, P. J. Cao, W. J. Liu, Y. X. Zeng, F. Jia & D. L. Zhu

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  1. S. Han
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  3. Y. M. Lu
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Correspondence to Y. M. Lu.

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Han, S., Peng, S., Lu, Y.M. et al. UV absorption characteristics and element composition of (200) and (111) orientation cubic MgZnO thin films deposited at different temperature by PLD method. J Mater Sci: Mater Electron 26, 4330–4336 (2015). https://doi.org/10.1007/s10854-015-2988-1

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