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Micro assembly in a SEM chamber and the solution for collision prevention

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Abstract

As the micro assembly becomes more and more important, it is necessary to make it reliable and expeditious. In this paper the scope is on the micro assembly in the chamber of the scanning electron microscope during which a micro gripper approaches the specimen holder and the micro components positioned on it are picked up. The current design of equipment in the SEM chamber does not allow an assessment of the position in the z-direction that causes that tips of micro grippers could break if they collide with the specimen holder. Here is described the video system consisted of micro camera with the magnifications lenses and mess stripe, which enables accurately watching the approaching to the micro components and exact calculation of the distance between micro gripper and the micro component.

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References

  1. Cvetanovic Al, Cvetanovic An, Andrijasevic D, Giouroudi I, Brenner W (2006) A Novel Protective Cover in Assembling of Micro Components in a SEM Chamber. The Second IEEE Conference on Automation Science and Engineering (IEEE-CASE), October 8–10, 2006, Shanghai, China

  2. Fatikow S, Seyfried J, Fahlbusch St, Bürkle A, Schmoeckel F (2000) A Flexible Microrobot-Based Microassembly Station. J Intel Robotic Syst 27:135–169

  3. Haferkorn H (2003) Optik. Physikalisch-technische Grundlagen und Anwendungen, Kap. 6.2.3, S. 555–559

  4. Hansma P, Conrad J (2006) Introduction to Depth of Field (PDF) and Depth of Field of Field (PDF) (comments) View Camera Focusing in Practice. Photo Techniques

  5. Ivanovic D dr, Vucic V (1984) Fizika II, Naucna Knjiga, Beograd, S 423–429

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Acknowledgments

This work was supported by FP6 Marie Curie Research Training Network “Advanced Methods and Tools for Handling and Assembly in Micro technology—ASSEMIC”, funded by the European Commission, Contract no. MRTN-CT-2003-504826. Also, this work was carried out within the framework of the EC Network of Excellence Multi-Material Micro Manufacture: Technologies and Applications (4M). Contract no. FP6 500274-2.

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Authors and Affiliations

  1. Institute of Sensor and Actuator Systems, Vienna University of Technology, Floragasse 7/2. Stock, 1040, Vienna, Austria

    Al. Cvetanovic, D. Andrijasevic & W. Brenner

  2. Landeggerstraße 5b/4, 2491, Neufeld an der Leitha, Austria

    An. Cvetanovic

  3. Tomeckova 3, 63800, Brno, Czech Republic

    M. Soucek

Authors
  1. Al. Cvetanovic
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  2. An. Cvetanovic
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  3. M. Soucek
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  4. D. Andrijasevic
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  5. W. Brenner
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Correspondence to Al. Cvetanovic.

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Cvetanovic, A., Cvetanovic, A., Soucek, M. et al. Micro assembly in a SEM chamber and the solution for collision prevention. Microsyst Technol 14, 835–839 (2008). https://doi.org/10.1007/s00542-008-0617-0

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  • DOI: https://doi.org/10.1007/s00542-008-0617-0

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