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Femtosecond laser internal manufacturing of three-dimensional microstructure devices

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Abstract

Potential applications for three-dimensional microstructure devices developed rapidly across numerous fields including microoptics, microfluidics, microelectromechanical systems, and biomedical devices. Benefiting from many unique fabricating advantages, internal manufacturing methods have become the dominant process for three-dimensional microstructure device manufacturing. This paper provides a brief review of the most common techniques of femtosecond laser three-dimensional internal manufacturing (3DIM). The physical mechanisms and representative experimental results of 3D manufacturing technologies based on multiphoton polymerization, laser modification, microexplosion and continuous hollow structure internal manufacturing are provided in details. The important progress in emerging applications based on the 3DIM technologies is introduced as well.

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Acknowledgments

The authors gratefully acknowledge reproduction permissions provided by Nature Publishing Group, Optical Society of America, the Royal Society of Chemistry, Springer-Verlag, American Institute of Physics, John Wiley and Sons, and Elsevier B.V.. We also acknowledge and thank the financial support from the National Natural Science Foundation of China (Grant 50875007), the Ministry of Science and Technology of China Major Project of Scientific Instruments and Equipment Development (Grant 2011YQ030112), Key Projects of Science and Technology of Beijing Municipal Commission of Education (Grant KZ201210005009 and KZ201410005001), the Beijing Natural Science Foundation (Grant 4132017), the Beijing high level overseas talent project and the international exchange grant of the graduate school of Beijing Institute of Technology. In addition, we appreciate the research initiative funding provided by the University of Tennessee as a new hire package.

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Authors and Affiliations

  1. Institute of Laser Engineering, Beijing University of Technology, 100 Pingle Yuan, Chaoyang District, Beijing, 100124, People’s Republic of China

    Chong Zheng, Anming Hu, Tao Chen & Shibing Liu

  2. Department of Mechanical, Aerospace and Biomedical Engineering, The University of Tennessee, Knoxville, TN, 37920, USA

    Chong Zheng & Anming Hu

  3. Verschuren Centre, Department of Biology, Cape Breton University, P. O. Box 5300, 1250 Grand Lake Rd., Sydney, B1P 6L2, Canada

    Ken D. Oakes

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  1. Chong Zheng
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  2. Anming Hu
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  3. Tao Chen
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  4. Ken D. Oakes
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  5. Shibing Liu
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Correspondence to Anming Hu or Tao Chen.

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Zheng, C., Hu, A., Chen, T. et al. Femtosecond laser internal manufacturing of three-dimensional microstructure devices. Appl. Phys. A 121, 163–177 (2015). https://doi.org/10.1007/s00339-015-9403-x

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