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Three-dimensional micro-channels in polymers: one-step fabrication

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Abstract

We report on the femtosecond laser fabrication of micro-channels of sub-micrometer cross section recorded in polymethylmethacrylate (PMMA) films in a single processing step. Both axial lengths of an elliptical cross section smaller than 0.4 μm were achieved for a fabrication irradiance close to the dielectric breakdown of PMMA. Femtosecond pulsed irradiation was scanned along the three-dimensional (3D) patterns inside the film. Channels have a self-formed densified cladding and can be 3D stacked into any pre-designed pattern and can extend over a mm length. These features are prospective for micro-total analysis system (μ-TAS) chip fabrication, micro- or nano-fluidic studies, and photonic applications such as photonic crystals .

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Authors and Affiliations

  1. Department of Ecosystem Engineering, The University of Tokushima, 2-1 Minamijosanjima, 770-8506, Tokushima, Japan

    K. Yamasaki , S. Juodkazis , S. Matsuo  & H. Misawa

  2. Core Research for Evolution Science & Technology (CREST), Japan Science & Technology Corporation (JST), Japan

    S. Juodkazis , S. Matsuo  & H. Misawa

  3. Research Institute for Electronic Science, Hokkaido University, 060-0812, Sapporo, Japan

    H. Misawa

Authors
  1. K. Yamasaki
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  2. S. Juodkazis
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  3. S. Matsuo
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  4. H. Misawa
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Corresponding author

Correspondence to H. Misawa .

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PACS

42.70.-a; 42.70.Jk; 81.16.-c; 81.40.-z; 82.35.Lr

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Yamasaki , K., Juodkazis , S., Matsuo , S. et al. Three-dimensional micro-channels in polymers: one-step fabrication. Appl Phys A 77, 371–373 (2003). https://doi.org/10.1007/s00339-003-2191-8

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  • DOI: https://doi.org/10.1007/s00339-003-2191-8

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