Article

Applied Physics B

, Volume 109, Issue 1, pp 105-111

Open Access This content is freely available online to anyone, anywhere at any time.

Imaging of nanostructures with sub-100 nm spatial resolution using a desktop EUV microscope

  • Przemyslaw W. WachulakAffiliated withInstitute of Optoelectronics, Military University of Technology Email author 
  • , Andrzej BartnikAffiliated withInstitute of Optoelectronics, Military University of Technology
  • , Henryk FiedorowiczAffiliated withInstitute of Optoelectronics, Military University of Technology
  • , Dalibor PánekAffiliated withFaculty of Biomedical Engineering, Czech Technical University in Prague
  • , Petr BrůžaAffiliated withFaculty of Biomedical Engineering, Czech Technical University in Prague

Abstract

Laser-produced plasma sources of short-wavelength radiation offer an interesting alternative to synchrotron and free-electron laser installations. Recently, we reported on a newly developed desktop EUV microscope based on plasma generated from a gas-puff target and diffractive optics. The half-pitch resolution of the microscope approached 50 nm. Compared to analogous microscopes based on synchrotron sources, our system is compact and cost-effective. In this paper, we present the results of imaging experiments on a thin polycrystalline object that was carried out in order to further examine the applicability of the microscope. We have demonstrated here that EUV microscopy can provide structural information that cannot be accessed by conventional optical microscopy or SEM.