Abstract
By means of chemical vapor deposition (CVD) in a quasi-closed space with the use of a separate vaporizer, indium and tin oxides (ITOs)/glass structures with high conductivity and transparency and a thickness of up to 3 μm are obtained; they are suitable for the manufacture of protective coatings of mirrors with a reflecting facial layer.
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Original Russian Text © I.G. Atabaev, M.U. Khazhiev, S.B. Zakirova, Z. Shermatov, 2017, published in Geliotekhnika, 2017, No. 4, pp. 42–46.
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Atabaev, I.G., Khazhiev, M.U., Zakirova, S.B. et al. Correlation between the structure, specific resistance, and optical properties of ITO films grown by CVD. Appl. Sol. Energy 53, 322–325 (2017). https://doi.org/10.3103/S0003701X1704003X
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DOI: https://doi.org/10.3103/S0003701X1704003X