Skip to main content
SpringerLink
Log in

Growth Features of Thin Epitaxial Magnesium Oxide Films on Sapphire

  • NANOELECTRONICS
  • Published:
Journal of Communications Technology and Electronics Aims and scope Submit manuscript

Abstract—Epitaxial (111) MgO films on sapphire with (0001) orientation were grown by high-frequency magnetron reactive sputtering. The X-ray structural analysis of the films obtained in combination with layer-by-layer plasma etching showed the presence of a thin transition layer with lattice parameters corresponding to the cubic structure of MgO with signs of rhombohedral strain.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1.
Fig. 2.

Similar content being viewed by others

REFERENCES

  1. I. M. Kotelyansky, V. B. Kravchenko, V. A. Luzanov, and A. T. Sobolev, Bull. Materials Sci. 14, 479 (1991).

    Article  Google Scholar 

  2. Y. Chen, H. Ko, S. Hong, and T. Yao, Appl. Phys. Lett. 76, 559 (2000).

    Article  Google Scholar 

  3. W. H. Butler, X.-G. Zhang, T. C. Schulthess, and J. M. MacLaren, Phys. Rev. 63, 054416 (2001).

    Article  Google Scholar 

  4. C. Martínez-Boubeta, A. S. Botana, and V. Pardo, Phys. Rev. 86, 041407(R) (2012).

  5. P. A. Stampe, M. Bullock, W. P. Tucker, and R. J. Kenned, J. Phys. D: Appl. Phys. 32, 1778 (1999).

    Article  Google Scholar 

  6. J. Talvacchio, G. R. Wagner, and H. C. Pohl, Physica C: Superconduct. Its Appl. 162–164, 659 (1989), Part 1.

  7. S. Yadavalli, M. H. Yang, and C. P. Flynn, Phys. Rev. 41, 7961 (1990).

    Article  Google Scholar 

  8. A. F. Chow, S. H. Rou, D. J. Lichtenwalner, et al., MRS Proc. 268, 253 (1992).

  9. D. X. Li, P. Pirouz, and A. H. Heue, Philosoph. Mag. A 65, 403 (1992).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Fryazino Branch, Kotelnikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, 141190, Fryazino, Moscow oblast, Russia

    V. A. Luzanov

Authors
  1. V. A. Luzanov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to V. A. Luzanov.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Luzanov, V.A. Growth Features of Thin Epitaxial Magnesium Oxide Films on Sapphire. J. Commun. Technol. Electron. 64, 720–721 (2019). https://doi.org/10.1134/S1064226919070118

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1064226919070118

Search

Navigation