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A Bulk Plasma Generator Based on a Plasma Cathode Discharge

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Abstract

The design, operating features, and parameters of a bulk plasma generator based on a steady-state low-pressure discharge with the additional injection of electrons from an external emitter are described. An additional constricted-arc discharge plasma is used as an electron emitter. This type of a discharge system ensures the formation of a homogeneous and stable gas plasma with a concentration of up to 2 ×1010 cm–3 in a volume of 1 m3 at a pressure of up to 3 × 10–4 Torr in a vacuum chamber. At a discharge current of up to 10 A, its voltage is 100–150 V. The device is characterized by a high efficiency of the energy utilization and a long service life, can operate with chemically active gases, and is easy to adjust and maintain.

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Authors and Affiliations

  1. Siberian Division, Russian Academy of Sciences, Institute of High Current Electronics, pr. Akademicheskii 4, Tomsk, 634055, Russia

    A. V. Vizir, M. V. Shandrikov & G. Yu. Yushkov

  2. State University of Control Systems and Radio Electronics, pr. Lenina 40, Tomsk, 634050, Russia

    E. M. Oks*

Authors
  1. A. V. Vizir
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  2. E. M. Oks*
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  3. M. V. Shandrikov
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  4. G. Yu. Yushkov
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Vizir, A.V., Oks*, E.M., Shandrikov, M.V. et al. A Bulk Plasma Generator Based on a Plasma Cathode Discharge. Instruments and Experimental Techniques 46, 384–387 (2003). https://doi.org/10.1023/A:1024478708509

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  • DOI: https://doi.org/10.1023/A:1024478708509

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