Abstract
We describe the design and main parameters of a fore-vacuum pressure, plasma-cathode electron source with an extended range of operating pressure. The source forms a ribbon electron beam with cross section 10 × 220 mm2 over a pressure range from 10–1 to 10 Pa. This wide pressure range is achieved by using two auxiliary hollow cathode discharge systems, between which there is a pressure difference. The beam current is up to 450 mA and the electron energy up to 8 keV. Inhomogeneity of the beam current density distribution is less than 15%. These beam parameters are advantageous for beam-plasma generation for the implementation of plasma chemical deposition of coatings.
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ACKNOWLEDGMENTS
Special thanks to Ian Brown (Berkeley Lab) for English correction and helpful discussion.
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The work was supported by a grant of the Ministry of Science and Higher Education of the Russian Federation, FEWM-2023-0012.
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Klimov, A.S., Bakeev, I.Y., Dagri, J.E. et al. Fore-Vacuum Ribbon Beam Plasma Electron Source Based on a Two-Stage Discharge System. Bull. Russ. Acad. Sci. Phys. 88, 631–636 (2024). https://doi.org/10.1134/S1062873823706128
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DOI: https://doi.org/10.1134/S1062873823706128