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On the Mathematical Modeling of a MEMS-Based Sensor for Simultaneous Measurement of Fluids Viscosity and Density

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Abstract

This paper discusses a novel microelectromechanical sensor for simultaneous measurement of fluids viscosity and density. Its operation is based on a longitudinal piezoelectric actuation of a micro-beam in a laminar fluid field. The proposed sensor consists of a micro-beam and a micro-cylindrical sensing element immersed in a fluid. In order to actuate the sensor longitudinally, the micro-beam is bonded with two piezoelectric layers on its upper and lower surfaces which are subjected to an AC voltage. The coupled governing partial differential equations of the micro-beam and fluid field have been derived. The obtained governing differential equations with time-varying boundary conditions have been transformed to an enhanced form with homogeneous boundary conditions. The enhanced equations have been discretized over the beam and fluid domain using Galerkin based reduced order model. The dynamic response of the sensing element for different piezoelectric actuation voltages and different exciting frequencies has been investigated. The effects of viscosity and density of fluids and geometrical parameters of the sensor on sensing element response have been studied.

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Authors and Affiliations

  1. Mechanical Engineering Department, Faculty of Engineering, Urmia University, Urmia, Iran

    Ghader Rezazadeh & Mina Ghanbari

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  1. Ghader Rezazadeh
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  2. Mina Ghanbari
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Correspondence to Mina Ghanbari.

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Rezazadeh, G., Ghanbari, M. On the Mathematical Modeling of a MEMS-Based Sensor for Simultaneous Measurement of Fluids Viscosity and Density. Sens Imaging 19, 27 (2018). https://doi.org/10.1007/s11220-018-0213-z

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  • DOI: https://doi.org/10.1007/s11220-018-0213-z

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