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Femtosecond laser pulse ablation of GaAs and InP: studies utilizing scanning and transmission electron microscopy

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Abstract

Single pulse laser ablation of GaAs and InP using 130 fs light pulses at ≈800 nm was studied with various techniques, in particular, scanning and transmission electron microscopies. The final state of the material near the laser-ablated region following femtosecond ablation was characterized in detail for selected laser fluences. Threshold ablation laser fluences were also obtained for both compounds.

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References

  1. D. Bäuerle: Laser Processing and Chemistry, 3rd edn. (Springer Verlag, Berlin 2000), and references therein

  2. K. Sokolowski-Tinten, H. Schulz, J. Bialkowski, D. von der Linde: Appl. Phys. A 53, 227 (1991)

    ADS  Google Scholar 

  3. X. Liu, D. Du, G. Mourou: IEEE J. Quantum Electron. QE-33, 1706 (1997)

  4. P.P. Pronko, S.K. Dutta, D. Du, R.K. Singh: J. Appl. Phys 78, 6233 (1995)

    Article  ADS  Google Scholar 

  5. D. Ashkenasi, A. Rosenfeld, H. Rosenfeld, H. Varel, M. Wähmer, E.E.B. Campbell: Appl. Surf. Sci. 120, 65 (1997)

    Article  ADS  Google Scholar 

  6. H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wähmer, E.E.B. Campbell: Appl. Phys A 65, 367 (1997)

    Article  ADS  Google Scholar 

  7. S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B.N. Chichkov, B. Wellegehausen, H. Welling: J. Opt. Soc. Am. B 14, 2716 (1997)

    Article  ADS  Google Scholar 

  8. Sokolowski-Tinten, J. Bialkowski, D. von der Linde: Phys. Rev. B 51, 14186 (1995)

  9. X. Zhu, D.M. Villeneuve, A.Y. Naumov, S. Nikumb, P.B. Corkum: Appl. Surf. Sci. 152, 138 (1999)

    Article  ADS  Google Scholar 

  10. M. Lenzner, J. Krüger, W. Kautek, F. Krausz: Appl. Phys. A 69, 465 (1999)

    Article  ADS  Google Scholar 

  11. J. Bonse, S. Baudach, J. Krüger, W. Kautek, M. Lenzner: Appl. Phys. A 74, 19 (2002)

    Article  ADS  Google Scholar 

  12. S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. von Alvensleben, H. Welling: Appl. Phys A 68, 563 (1999)

    Article  ADS  Google Scholar 

  13. A. Cavalleri, K. Sokolowski-Tinten, J. Bialkowski, D. von der Linde: Appl. Phys. Lett. 72, 2385 (1998)

    ADS  Google Scholar 

  14. C.B. Schaffer, A. Brodeur, J.F. García, E. Mazur: Opt. Lett. 26, 93 (2001)

    Article  ADS  Google Scholar 

  15. K. Minoshima, A.M. Kowalevicz, I. Hartl, E.P. Ippen, J.G. Fujimoto: Opt. Lett. 26, 1516 (2001)

    Article  ADS  Google Scholar 

  16. A. Rousse, C. Rischel, S. Fourmaux, I. Uschmann, S. Sebban, G. Grillon, P. Balcou, E. Förster, J.P. Geindre, P. Audebert, J.C. Gauthier, D. Hulin: Nature 410, 65 (2001)

    ADS  Google Scholar 

  17. C. Rose-Petruck, R. Jimenez, T. Guo, A. Cavalleri, C.W. Siders, F. Ráksi, J.A. Squier, B.C. Walker, K.R. Wilson, C.P.J. Barty: Nature 398, 310 (1999)

  18. A. Cavalleri, C.W. Siders, F.L.H. Brown, D.M. Leitner, C. Tóth, J.A. Squier, C.P.J. Barty, K.R. Wilson, K. Sokolowski-Tinten, M. Horn von Hoegen, D. von der Linde, M. Kammler: Phys. Rev. Lett. 85, 586 (2000)

  19. A.M. Lindenberg, I. Kang, S.L. Johnson, T. Missalla, P.A. Heimann, Z. Chang, J. Larsson, P.H. Bucksbaum, H.C. Kapteyn, H.A. Padmore, R.W. Lee, J.S. Wark, R.W. Falcone: Phys. Rev. Lett. 84, 111 (2000)

    Article  ADS  Google Scholar 

  20. A. Cavalleri, C. Tóth, C.W. Siders, J.A. Squier, F. Ráksi, P. Forget, J.C. Kieffer: Phys. Rev. Lett. 87, 237401 (2001)

    Article  ADS  Google Scholar 

  21. A. Borowiec, M. MacKenzie, G.C. Weatherly, H.K. Haugen: Appl. Phys. A 76, 201 (2003)

    Article  ADS  Google Scholar 

  22. J.M. Liu: Opt. Lett. 7, 196 (1982)

    Article  ADS  Google Scholar 

  23. A. Cavalleri, K. Sokolowski-Tinten, J. Bialkowski, M. Schreiner, D. von der Linde: J. Appl. Phys. 85, 3301 (1999)

    Article  ADS  Google Scholar 

  24. J.P. Long, S.S. Goldenberg, M.N. Kabler: Phys. Rev. Lett. 68, 1014 (1992)

    Article  ADS  Google Scholar 

  25. J. Bonse, J.M. Wrobel, J. Krüger, W. Kautek: Appl. Phys A 72, 89 (2001)

    ADS  Google Scholar 

  26. M. Argument, S. Kirkwood, K. Chau, A. van Popta, Y. Tsui, R. Fedosejevs: Tech. Digest SPIE: Proc. Opto-Canada TD01, 196 (2002)

  27. M. Prasad, H.E. Ruda, J.J. Dubowski: J. Vac. Sci. Technol. B 15, 2046 (1997)

  28. J.M. Wrobel, C.E. Moffitt, D.M. Wieliczka, J.J. Dubowski, J.W. Fraser: Appl. Surf. Sci. 127–129, 805 (1998)

    Article  ADS  Google Scholar 

  29. L. Huang, J.P. Callan, E.N. Glezer, E. Mazur: Phys. Rev. Lett. 80, 185 (1998)

    Article  ADS  Google Scholar 

  30. P. Stampfli, K.H. Bennemann: Phys. Rev. B 49, 7299 (1994); P. Stampfli, K.H. Brennemann: Appl. Phys. A 60, 191 (1995)

    Article  ADS  Google Scholar 

  31. J.S. Graves, R.E. Allen: Phys. Rev. B 58, 13627 (1998)

    Article  ADS  Google Scholar 

  32. S.I. Anisimov, N.A. Inogamov, A.M. Oparin, B. Rethfeld, T. Yabe, M. Ogawa, V.E. Fortov: Appl. Phys. A. 69, 617 (1999)

    Article  ADS  Google Scholar 

  33. N.A. Inogamov, Y.V. Petrov, S.I. Anisimov, A.M. Oparin, N.V. Shaposhnikov, D. von der Linde, J. Meyer-ter-Vehn: JETP Lett. 69, 310 (1999)

    ADS  Google Scholar 

  34. D. von der Linde, K. Sokolowski-Tinten: Appl. Surf. Sci. 154, 1 (2000)

    Article  ADS  Google Scholar 

  35. K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. von der Linde, A. Oparin, J. Meyer-ter-Vehn, S.I. Anisimov: Phys. Rev. Lett. 81, 224 (1998)

    Article  ADS  Google Scholar 

  36. A. Kelly, N.H. MacMillan: Strong Solids, 3rd edn. (Oxford Science Publications, New York 1986)

  37. A. Borowiec, H.K. Haugen, D.M. Bruce, D.T. Cassidy: Proc. CLEO 2001, p. 517

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Authors and Affiliations

  1. Brockhouse Institute for Materials Research, McMaster University, L8S 4M1, Hamilton, Ontario, Canada

    A. Borowiec , M. MacKenzie , G.C. Weatherly  & H.K. Haugen

  2. Department of Engineering Physics, McMaster University, L8S 4M1, Hamilton, Ontario, Canada

    A. Borowiec

  3. Department of Materials Science and the CEMD, McMaster University, L8S 4M1, Hamilton, Ontario, Canada

    G.C. Weatherly

  4. Departments of Engineering Physics, and Physics and Astronomy, and the CEMD, McMaster University, L8S 4M1, Hamilton, Ontario, Canada

    H.K. Haugen

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  1. A. Borowiec
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  2. M. MacKenzie
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  3. G.C. Weatherly
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  4. H.K. Haugen
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Correspondence to A. Borowiec .

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PACS

61.80.Ba; 64.60.-i; 79.20.Ds

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Borowiec , A., MacKenzie , M., Weatherly , G. et al. Femtosecond laser pulse ablation of GaAs and InP: studies utilizing scanning and transmission electron microscopy. Appl Phys A 77, 411–417 (2003). https://doi.org/10.1007/s00339-002-1949-8

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  • DOI: https://doi.org/10.1007/s00339-002-1949-8

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