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Experimental evidence for GaAs surface quality affecting ohmic contact properties

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Abstract

An experimental study is described of barrier heights at the junction between (111) faces of semiconductingn-type bulk GaAs and alloyed In−Ge−Ag metal contacts. It is observed that strong corrugation of the semiconducting surface causes the barrier height to be higher than that of flat surfaces.

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References

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Paria, H., Hartnagel, H. Experimental evidence for GaAs surface quality affecting ohmic contact properties. Appl. Phys. 10, 97–99 (1976). https://doi.org/10.1007/BF00929535

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  • DOI: https://doi.org/10.1007/BF00929535

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