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A contribution to etch polishing of GaAs

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References

  1. V. L. Rideout,J. Electrochem. Soc. 119 (1972) 1778.

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  2. B. Schwartz,ibid 118 (1971) 657.

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  3. H. C. Gatos (ed) “Properties of elemental and compound Semiconductors” (Interscience, New York, 1960) p. 226.

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Authors and Affiliations

  1. Department of Electrical and Electronic Engineering, The University of Newcastle upon Tyne, UK

    H. Hartnagel & B. L. Weiss

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  1. H. Hartnagel
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  2. B. L. Weiss
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Hartnagel, H., Weiss, B.L. A contribution to etch polishing of GaAs. J Mater Sci 8, 1061–1063 (1973). https://doi.org/10.1007/BF00756642

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  • DOI: https://doi.org/10.1007/BF00756642

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