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Ultra-precision Surfaces and Structures with Nanometer Accuracy by Ion Beam and Plasma Jet Technologies

  • Living reference work entry
  • First Online:
Encyclopedia of Nanotechnology

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Synonyms

Chemical-assisted ion beam etching – CAIBE; Chemical vapor machining – CVM; Ion beam etching – IBE; Ion beam figuring – IBF; Ion beam smoothing – IBS; Plasma-assisted chemical etching – PACE; Plasma jet machining – PJM; Rapid atomic processing – RAP; Reactive ion beam etching – RIBE; Surface figuring; Surface patterning; Ultra-precision finishing; Ultra-precision machining

Definition

Ultra-precision surfaces and structures with nanometer accuracy comprise surface shapes and/or surface structures with the highest achievable processing accuracy of nanometer or even picometer rms range. Root mean square (rms) is a value calculated from differences of the surface measuring data and the desired (designed) surface shape data. Its value is a measure of how far on average the error is from zero. The ultimate accuracy of surface shapes and structures is a prerequisite for their physical functioning in many of today’s fields of science, technology, and products like electronics,...

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Author information

Authors and Affiliations

  1. Leibniz-Institute of Surface Modification, Permoserstraße. 15, D-04318, Leipzig, Germany

    Thomas Arnold & Frank Frost

  2. NTG Neue Technologien GmbH & Co. KG, Im Steinigen Graben 12-14, D-63571, Gelnhausen, Germany

    Thomas Franz & Axel Schindler

Authors
  1. Thomas Arnold
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  2. Thomas Franz
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  3. Frank Frost
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  4. Axel Schindler
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Corresponding author

Correspondence to Thomas Arnold .

Editor information

Editors and Affiliations

  1. Biomimetics (NLB²), Ohio State University Nanoprobe Lab. for Bio- & Nanotechnology, Columbus, Ohio, USA

    Bharat Bhushan

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Arnold, T., Franz, T., Frost, F., Schindler, A. (2015). Ultra-precision Surfaces and Structures with Nanometer Accuracy by Ion Beam and Plasma Jet Technologies. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-6178-0_100926-1

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  • DOI: https://doi.org/10.1007/978-94-007-6178-0_100926-1

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  • Online ISBN: 978-94-007-6178-0

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