Encyclopedia of Nanotechnology

Living Edition
| Editors: Bharat Bhushan

Ultra-precision Surfaces and Structures with Nanometer Accuracy by Ion Beam and Plasma Jet Technologies

  • Thomas Arnold
  • Thomas Franz
  • Frank Frost
  • Axel Schindler
Living reference work entry
DOI: https://doi.org/10.1007/978-94-007-6178-0_100926-1



Ultra-precision surfaces and structures with nanometer accuracy comprise surface shapes and/or surface structures with the highest achievable processing accuracy of nanometer or even picometer rms range. Root mean square (rms) is a value calculated from differences of the surface measuring data and the desired (designed) surface shape data. Its value is a measure of how far on average the error is from zero. The ultimate accuracy of surface shapes and structures is a prerequisite for their physical functioning in many of today’s fields of science, technology, and products like electronics,...


Sacrificial Layer Spatial Wavelength Removal Function Ultraprecision Machine Full Aperture 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Copyright information

© Springer Science+Business Media Dordrecht 2015

Authors and Affiliations

  • Thomas Arnold
    • 1
  • Thomas Franz
    • 2
  • Frank Frost
    • 1
  • Axel Schindler
    • 2
  1. 1.Leibniz-Institute of Surface ModificationLeipzigGermany
  2. 2.NTG Neue Technologien GmbH & Co. KGGelnhausenGermany