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Processing Techniques and Process Flows with Porous Silicon

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Handbook of Porous Silicon

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Abstract

Porosified silicon wafers or powders from electrochemical etching of bulk silicon, or from silica reduction, often require a series of additional processing steps, prior to use. In this expanded review a compendium of over 70 processing techniques is provided, linking all of them to either dedicated process reviews or related chapters in the handbook. The processing techniques are grouped into 8 processing functions: patterning, size reduction, size classification, drying, passivation, coating, pore impregnation and skeleton doping. Typical process flows are illustrated for wafer substrates, membranes, particles and composites, giving examples of where the choice and order of processing steps can be important. Examples are also given of processing topics yet to be widely explored with porous silicon, but which could become important for some of the emerging applications.

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Authors and Affiliations

  1. School of Physics and Astronomy, University of Birmingham, Edgbaston, B15 2TT, Birmingham, UK

    Leigh Canham

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  1. Leigh Canham
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Correspondence to Leigh Canham .

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  1. Malvern Hills Science Park, Chief Scientific Officer, Intrinsiq Mate, Malvern, Worcestershire, United Kingdom

    Leigh Canham

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Canham, L. (2018). Processing Techniques and Process Flows with Porous Silicon. In: Canham, L. (eds) Handbook of Porous Silicon. Springer, Cham. https://doi.org/10.1007/978-3-319-04508-5_53-3

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  • DOI: https://doi.org/10.1007/978-3-319-04508-5_53-3

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-04508-5

  • Online ISBN: 978-3-319-04508-5

  • eBook Packages: Springer Reference Chemistry and Mat. ScienceReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics

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Chapter history

  1. Latest

    Processing Techniques and Process Flows with Porous Silicon
    Published:
    07 December 2017

    DOI: https://doi.org/10.1007/978-3-319-04508-5_53-3

  2. Typical Processing Steps with Porous Silicon
    Published:
    11 July 2017

    DOI: https://doi.org/10.1007/978-3-319-04508-5_53-2

  3. Original

    Typical Processing Steps with Porous Silicon
    Published:
    08 September 2014

    DOI: https://doi.org/10.1007/978-3-319-04508-5_53-1

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