Abstract
Introducing nanoscale porosity into silicon dramatically lowers its stiffness and hardness in a tunable manner over a wide range. Available data is collated on Young’s modulus and Vickers hardness as a function of porosity and layer morphology. There is little quantitative data on fracture toughness and strength, but theoretical work predicts that optimized nanocomposites could be very mechanically durable. The exceptional plasticity recorded for individual silicon nanowires is yet to be demonstrated in mesoporous silicon. A number of application areas are highlighted that rely heavily on the mechanical properties of porous silicon.
References
Alan T et al (2006) Methyl monolayers improve the fracture strength and durability of silicon nanobeams. Appl Phys Lett 89:231905
Aliev GN, Goller P, Snow P (2011) Elastic properties of porous silicon studied by acoustic transmission spectroscopy. J Appl Phys 110:043534
Barla K et al (1984) Determination of lattice parameter and elastic properties of porous silicon by X-ray diffraction. J Cryst Growth 68:727
Bellet D et al (1996) Nanoindentation investigation of the Young’s Modulus of porous silicon. J Appl Phys 80:3772
Charitidis CA et al (2011) Nanomechanical properties of thick porous silicon layers grown on p − and p + type bulk crystalline silicon. Mater Sci Eng A528:8715–8722
Da Fonesca RJM et al (1995) Acoustic investigation of porous silicon layers. J Mater Sci 30:35
Doghmane A et al (2006) Microacoustic evaluation of elastic parameters of highly porous silicon layers. Semicond Phys Quant Electron Optoticelectron 9(3):4–11
Drory MD, Searson PC, Liu L (1990) The mechanical properties of porous silicon membranes. J Mater Sci Lett 10:81–82
Duttagupta SP et al (1997) Microhardness of porous silicon films and composites. Solid State Commun 101(1):33–37
Fang Z, Hu M, Zhang W, Zhang X, Yang H (2008) Thermal conductivity and nanoindentation hardness of as-prepared and oxidized porous silicon layers. J Mater Sci Mater Electron 19:1128–1134
Fang Z et al (2009) Mechanical properties of porous silicon by depth-sensing nanoindentation techniques. Thin Solid Films 517(9):2930–2935
Garcia AP et al (2010) Bioinspired nanoporous silicon provides great toughness at great deformability. Comput Mater Sci 48:303–309
Gerberich WW et al (2003) Superhard silicon nanospheres. J Mech Phys Solids 51(6): 979–992
Gibson LJ, Ashby MF (1997) Cellular solids: structure and properties, 2nd edn. Cambridge University Press, Cambridge, UK
Han X, Zheng K, Zhang YF, Zhang X, Zhang Z, Wang ZL (2007) Low temperature in situ large-strain plasticity of silicon nanowires. Adv Mater 19(16):2112–2118
Ishida T et al (2011) Exceptional plasticity of silicon nanobridges. Nanotechnology 22(35):355704
Klyshko A et al (2008) Mechanical strength of porous silicon and its possible applications. Superlattices Microstruct 44:374–377
Magoariec H and Danescu A (2009) Modelling macroscopic elasticity of porous silicon. Phys Stat Solidi 6(7):1680–1684
Martini R et al (2012) Mechanical properties of sintered mesoporous silicon: a numerical model. Nanoscale Res Lett 7:597
Miller DC, Boyce BL, Kotula PG, Stoldt CR (2008) Connections between morphological and mechanical evolution during galvanic corrosion of micromachined polycrystalline and monocrystalline silicon. J Appl Phys 103:123518
Ni H et al (2005) Nanoscale structural and mechanical characterization of bamboo-like polymer/silicon nanocomposite films. Nanotechnology 16:1746–1753
Oisten MK et al (2009) A Young’s modulus study of n- and p-type porous silicon. Phys Stat Solidi A 206(6):1278–1281
Peterson KE (1982) Silicon as a mechanical material. Proc IEEE 70(5):420
Phalippou J et al (1989) Fracture toughness of silica aerogels. Revue De Phys Appl C4(24):191–196
Populaire CH et al (2003) On mechanical properties of nanostructured mesoporous silicon. Appl Phys Lett 83:1370
Rahmoun K et al (2009) A multilayer model for describing hardness variations of aged porous silicon low-dielectric constant thin films. Thin Solid Films 518:213–221
Rice RW (ed) (1998) Porosity of ceramics. Marcel Dekker, New York
Sohn YS et al (2010) Mechanical properties of silicon nanowires. Nanoscale Res Lett 5:211–216
Wang F et al (2011) Conciliating surface superhydrophobicities and mechanical strength of porous silicon films. Appl Surf Sci 257:2752–2755
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2014 Springer International Publishing Switzerland
About this entry
Cite this entry
Canham, L. (2014). Mechanical Properties of Porous Silicon. In: Canham, L. (eds) Handbook of Porous Silicon. Springer, Cham. https://doi.org/10.1007/978-3-319-04508-5_21-1
Download citation
DOI: https://doi.org/10.1007/978-3-319-04508-5_21-1
Received:
Accepted:
Published:
Publisher Name: Springer, Cham
Online ISBN: 978-3-319-04508-5
eBook Packages: Springer Reference Chemistry and Mat. ScienceReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics
Publish with us
Chapter history
-
Latest
Mechanical Properties of Porous Silicon- Published:
- 17 November 2017
DOI: https://doi.org/10.1007/978-3-319-04508-5_21-2
-
Original
Mechanical Properties of Porous Silicon- Published:
- 25 August 2014
DOI: https://doi.org/10.1007/978-3-319-04508-5_21-1