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Mechanical Properties of Porous Silicon

Handbook of Porous Silicon

Abstract

Introducing nanoscale porosity into silicon dramatically lowers its stiffness and hardness in a tunable manner over a wide range. Available data is collated on Young’s modulus and Vickers hardness as a function of porosity and layer morphology. There is little quantitative data on fracture toughness and strength, but theoretical work predicts that optimized nanocomposites could be very mechanically durable. The exceptional plasticity recorded for individual silicon nanowires is yet to be demonstrated in mesoporous silicon. A number of application areas are highlighted that rely heavily on the mechanical properties of porous silicon.

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References

  • Alan T et al (2006) Methyl monolayers improve the fracture strength and durability of silicon nanobeams. Appl Phys Lett 89:231905

    Google Scholar 

  • Aliev GN, Goller P, Snow P (2011) Elastic properties of porous silicon studied by acoustic transmission spectroscopy. J Appl Phys 110:043534

    Article  Google Scholar 

  • Barla K et al (1984) Determination of lattice parameter and elastic properties of porous silicon by X-ray diffraction. J Cryst Growth 68:727

    Article  Google Scholar 

  • Bellet D et al (1996) Nanoindentation investigation of the Young’s Modulus of porous silicon. J Appl Phys 80:3772

    Article  Google Scholar 

  • Charitidis CA et al (2011) Nanomechanical properties of thick porous silicon layers grown on p − and p + type bulk crystalline silicon. Mater Sci Eng A528:8715–8722

    Google Scholar 

  • Da Fonesca RJM et al (1995) Acoustic investigation of porous silicon layers. J Mater Sci 30:35

    Article  Google Scholar 

  • Doghmane A et al (2006) Microacoustic evaluation of elastic parameters of highly porous silicon layers. Semicond Phys Quant Electron Optoticelectron 9(3):4–11

    Google Scholar 

  • Drory MD, Searson PC, Liu L (1990) The mechanical properties of porous silicon membranes. J Mater Sci Lett 10:81–82

    Article  Google Scholar 

  • Duttagupta SP et al (1997) Microhardness of porous silicon films and composites. Solid State Commun 101(1):33–37

    Article  Google Scholar 

  • Fang Z, Hu M, Zhang W, Zhang X, Yang H (2008) Thermal conductivity and nanoindentation hardness of as-prepared and oxidized porous silicon layers. J Mater Sci Mater Electron 19:1128–1134

    Article  Google Scholar 

  • Fang Z et al (2009) Mechanical properties of porous silicon by depth-sensing nanoindentation techniques. Thin Solid Films 517(9):2930–2935

    Article  Google Scholar 

  • Garcia AP et al (2010) Bioinspired nanoporous silicon provides great toughness at great deformability. Comput Mater Sci 48:303–309

    Google Scholar 

  • Gerberich WW et al (2003) Superhard silicon nanospheres. J Mech Phys Solids 51(6): 979–992

    Google Scholar 

  • Gibson LJ, Ashby MF (1997) Cellular solids: structure and properties, 2nd edn. Cambridge University Press, Cambridge, UK

    Book  Google Scholar 

  • Han X, Zheng K, Zhang YF, Zhang X, Zhang Z, Wang ZL (2007) Low temperature in situ large-strain plasticity of silicon nanowires. Adv Mater 19(16):2112–2118

    Article  Google Scholar 

  • Ishida T et al (2011) Exceptional plasticity of silicon nanobridges. Nanotechnology 22(35):355704

    Article  Google Scholar 

  • Klyshko A et al (2008) Mechanical strength of porous silicon and its possible applications. Superlattices Microstruct 44:374–377

    Google Scholar 

  • Magoariec H and Danescu A (2009) Modelling macroscopic elasticity of porous silicon. Phys Stat Solidi 6(7):1680–1684

    Google Scholar 

  • Martini R et al (2012) Mechanical properties of sintered mesoporous silicon: a numerical model. Nanoscale Res Lett 7:597

    Article  Google Scholar 

  • Miller DC, Boyce BL, Kotula PG, Stoldt CR (2008) Connections between morphological and mechanical evolution during galvanic corrosion of micromachined polycrystalline and monocrystalline silicon. J Appl Phys 103:123518

    Article  Google Scholar 

  • Ni H et al (2005) Nanoscale structural and mechanical characterization of bamboo-like polymer/silicon nanocomposite films. Nanotechnology 16:1746–1753

    Article  Google Scholar 

  • Oisten MK et al (2009) A Young’s modulus study of n- and p-type porous silicon. Phys Stat Solidi A 206(6):1278–1281

    Article  Google Scholar 

  • Peterson KE (1982) Silicon as a mechanical material. Proc IEEE 70(5):420

    Article  Google Scholar 

  • Phalippou J et al (1989) Fracture toughness of silica aerogels. Revue De Phys Appl C4(24):191–196

    Google Scholar 

  • Populaire CH et al (2003) On mechanical properties of nanostructured mesoporous silicon. Appl Phys Lett 83:1370

    Google Scholar 

  • Rahmoun K et al (2009) A multilayer model for describing hardness variations of aged porous silicon low-dielectric constant thin films. Thin Solid Films 518:213–221

    Google Scholar 

  • Rice RW (ed) (1998) Porosity of ceramics. Marcel Dekker, New York

    Google Scholar 

  • Sohn YS et al (2010) Mechanical properties of silicon nanowires. Nanoscale Res Lett 5:211–216

    Google Scholar 

  • Wang F et al (2011) Conciliating surface superhydrophobicities and mechanical strength of porous silicon films. Appl Surf Sci 257:2752–2755

    Article  Google Scholar 

Download references

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Correspondence to Leigh Canham .

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© 2014 Springer International Publishing Switzerland

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Canham, L. (2014). Mechanical Properties of Porous Silicon. In: Canham, L. (eds) Handbook of Porous Silicon. Springer, Cham. https://doi.org/10.1007/978-3-319-04508-5_21-1

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  • DOI: https://doi.org/10.1007/978-3-319-04508-5_21-1

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  • Publisher Name: Springer, Cham

  • Online ISBN: 978-3-319-04508-5

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Chapter history

  1. Latest

    Mechanical Properties of Porous Silicon
    Published:
    17 November 2017

    DOI: https://doi.org/10.1007/978-3-319-04508-5_21-2

  2. Original

    Mechanical Properties of Porous Silicon
    Published:
    25 August 2014

    DOI: https://doi.org/10.1007/978-3-319-04508-5_21-1