Two-dimensional metallic photonic band-gap crystals fabricated by LIGA N. KatsarakisM. BenderC. M. Soukoulis Pages: 74 - 77
Microscreen-based replication of electroforming micromolds L. A. DomeierM. GonzalesA. M. Morales Pages: 78 - 82
Micromolded easy-assembly multi fiber connector: RibCon® U. WallrabeH. DittrichW. Zißler Pages: 83 - 87
Comparison of PMMA and SU-8 resist moulds for embossing of PZT to produce high-aspect-ratio microstructures using LIGA process A. SchneiderB. SuR. A. Lawes Pages: 88 - 92
Moving mask deep X-ray lithography system with multi stage for 3-D microfabrication O. TabataH. YouI. Dama Pages: 93 - 98
Deep lithography with a low energy synchrotron source: fabrication of X-ray refractive single lenses Y. ZhangT. KatohD. Amano Pages: 99 - 101
Exposure of photosensitive glasses with pulsed UV-laser radiation U. BrokmannM. JacquorieR. Poprawe Pages: 102 - 104
Production of metallic high aspect ratio microstructures by microcasting G. BaumeisterK. MuellerJ. Hausselt Pages: 105 - 108
Quasi-static and cyclic testing of specimens with high aspect ratios produced by micro-casting and micro-powder-injection-moulding M. AuhornT. BeckD. Löhe Pages: 109 - 112
Electrical bottom side contacting of electromechanical LIGA-structures by vias and screen printing A. RuzzuO. FromheinD. Haller Pages: 113 - 115
Swelling of PMMA-structures in aqueous solutions and room temperature Ni-electroforming A. RuzzuB. Matthis Pages: 116 - 119
The influence of X-ray fluorescence on LIGA sidewall tolerances S. K. GriffithsA. Ting Pages: 120 - 128
Development of novel PZT thin films for active sliders based on head load/unload on demand systems N. TagawaH. SekiA. Mori Pages: 133 - 138
Swing-arm-type PZT dual actuator with fast seeking for optical disk drive W.-I. ChoN.-C. ParkY.-P. Park Pages: 139 - 148
Air-bearing design and flying characteristics of flexible optical head slider combined with visible laser light guide T. HirotaT. OhkuboY. Ando Pages: 155 - 160
Design and analysis of dual-stage servo system for high track density HDDs S.-M. SuhC. C. ChungS.-H. Lee Pages: 161 - 168
Optical recording system using an integrated solid immersion lens T. S. SongH.-D. KwonY.-P. Park Pages: 169 - 173
Quality based design approach for a single crystal silicon microactuator using DOE technique and response surface model S. ChenJ. YangY. Lu Pages: 182 - 187
A novel contact slider/gimbal to raise recording density in flexible disk drives H. RyosonM. KondoY. Okazaki Pages: 188 - 193
Design and testing of track-following controllers for dual-stage servo systems with PZT actuated suspensions Y. LiR. Horowitz Pages: 194 - 205
Readout signal evaluation of optical flying head slider with visible light-wave guide flexure T. OhkuboK. TanakaK. Nakajima Pages: 212 - 219
