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MEMS-based accelerometers use in Hard Disk Drives

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Abstract

 We describe the use of micro electro-mechanical systems (MEMS)-based accelerometers for the compensation of vibrations in commercial hard disk drives (HDDs). Using formal analysis of the HDD mechanics, effects of generic roto-translation on the head position are evaluated. It is shown that such effects can be compensated using feed forward compensation from a weighted sum of the signal provided by two linear and one rotational accelerometer, mounted on the HDD. Rotational acceleration has been obtained using a recently developed MEMS-based, low cost rotational accelerometer. Experimental results presented here show 20 dB disturbance reduction, achieved with a simple, variable gain feed-forward compensator.

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Received: 5 July 2001/Accepted: 17 October 2001

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Oboe, R. MEMS-based accelerometers use in Hard Disk Drives. Microsystem Technologies 8, 174–181 (2002). https://doi.org/10.1007/s00542-001-0127-9

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  • DOI: https://doi.org/10.1007/s00542-001-0127-9

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