Adhesion of Ni-structures on Al2O3 ceramic substrates used for the sacrificial layer technique Th. KunzJ. MohrU. Wallrabe Pages: 121 - 125
A new control method for the relative dielectric constant of 1–3 piezoelectric composites realized with the LIGA process T. NumazawaY. HirataH. Takada Pages: 130 - 134
Deep ion projection lithography in PMMA: Substrate heating and ion energy concerns M. LindebergJ. BuckleyK. Hjort Pages: 135 - 140
Etching through silicon wafer in inductively coupled plasma S. FranssilaJ. KiihamäkiJ. Karttunen Pages: 141 - 144
Cost estimation for LIGA fabrication flows using process design methods K. HahnR. BrückC. Schneider Pages: 145 - 148
A micro cycloid-gear system fabricated by multi-exposure LIGA technique S. J. ChungH. HeinT. Akashi Pages: 149 - 153
A new sacrificial layer method of LIGA technology to fabricate movable part of a gripper F. YiE. TangD. Xian Pages: 154 - 156
Development of microconnector with an automatic connecting/disconnecting mechanism T. HagaH. OkuyamaH. Takada Pages: 157 - 160