Design and control of a single-stage dual-actuator system for high-precision manufacturing Michael D. KimKwang-Hee LeeSang-Moo Lee Technical Paper 20 December 2013 Pages: 175 - 183
Closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope Yongsong HeXiaosheng WuWu Liu Technical Paper 02 August 2013 Pages: 185 - 191
Effects of geometric parameters for superhydrophobicity of polymer surfaces fabricated by precision tooling machines Donghui ChuAkihiro NemotoHiroshi Ito Technical Paper 05 March 2013 Pages: 193 - 200
Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis Liang HeMasaya TodaTakahito Ono Technical Paper 17 March 2013 Pages: 201 - 208
Chemiluminescence detection for Cu (II) based on 1,10-Phenanthroline-hydrogen peroxide reaction on a PDMS microfluidic chip Xueye ChenHong ZengJincheng Yang Technical Paper 26 March 2013 Pages: 209 - 213
A study on effect of wafer bow in wafer-level BCB cap transfer packaging Seonho SeokJanggil Kim Technical Paper 27 March 2013 Pages: 215 - 219
Silicon 45° micromirrors fabricated by etching in alkaline solutions with organic additives Krzysztof P. RolaKonrad PtasińskiIrena Zubel Technical Paper Open access 20 June 2013 Pages: 221 - 226
Transition interface for improving the temperature characteristics of micromachined gyroscopes Zhanqiang HouXuezhong WuJianbin Su Technical Paper 04 August 2013 Pages: 227 - 234
Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators Mohamed Sultan Mohamed AliWang Ning YuanKenichi Takahata Technical Paper 26 March 2013 Pages: 235 - 241
An experimental investigation of mixing of carbon nanotube/polymer composite in a batch-type screw mixer Kyoung Duck SeoJang Min ParkDong Sung Kim Technical Paper 08 October 2013 Pages: 243 - 250
A novel self-aligned electrostatic vertical actuator using plastic deformation technology Wei LiZhaohui SongYuelin Wang Technical Paper 18 June 2013 Pages: 251 - 257
Preparation of sacrificial layer for MEMS devices by lift-off technology Jie YangYu ShiBo Du Technical Paper 30 October 2013 Pages: 259 - 263
A microacoustic analysis including viscosity and thermal conductivity to model the effect of the protective cap on the acoustic response of a MEMS microphone D. HomentcovschiR. N. MilesA. J. Zuckerwar Technical Paper 12 April 2013 Pages: 265 - 272
Development of the automated gold-linked electrochemical immunoassay system for blood monitoring Suguru ShioharaMiyuki ChikaeYuzuru Takamura Technical Paper 29 March 2013 Pages: 273 - 279
Design and analysis of a z-axis tuning fork gyroscope with guided-mechanical coupling Thong Quang TrinhLong Quang NguyenHung Ngoc Vu Technical Paper 26 October 2013 Pages: 281 - 289
Modeling the instability of CNT tweezers using a continuum model Amin FarrokhabadiAli KoochiMohamadreza Abadyan Technical Paper 25 June 2013 Pages: 291 - 302
Measurement of local electric field in microdevices for low-voltage electroporation of adherent cells Hirofumi ShintakuKazumi HakamadaSatoyuki Kawano Technical Paper 25 April 2013 Pages: 303 - 313
Droplet-based biochemical assay by magnetic wire manipulation between multiple droplets Mitsuhiro ShikidaTatsuaki SugitoHiroyuki Honda Technical Paper 04 April 2013 Pages: 315 - 323
Carbon nanotube based miniaturized electron gun and column assembly Javad KoohsorkhiShamsoddin Mohajerzadeh Technical Paper 15 August 2013 Pages: 325 - 336
Design of novel compact anti-stiction and low insertion loss RF MEMS switch Deepak BansalAmit KumarK. J. Rangra Technical Paper 11 May 2013 Pages: 337 - 340
New approach for batch microfabrication of silicon-based micro fuel cells N. SabatéJ. P. EsquivelL. Fonseca Technical Paper 30 March 2013 Pages: 341 - 348
