Volume 2, Issue 2 | Microsystem Technologies

Microsystem Technologies

Micro- and Nanosystems Information Storage and Processing Systems

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Volume 2, Issue 2

February 1996

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14 articles in this issue

International Conference on High Aspect-Ratio Microstructure Technology HARMST '95
P. Bley
W. Menz
H. O. Moser
Editorial Pages: 39 - 39
Fabrication of stepped microoptical benches for fibre and free space applications
A. Müller
J. Göttert
A. Rogner
Technical Papers Pages: 40 - 45
The copolymer of methyl methacrylate and methacrylic acid as a sensitive resist for deep-etch X-ray lithography
T. Numazawa
Y. Hirata
H. Takada
Technical Papers Pages: 46 - 49
The effect of residual solvent on the profiles of thick positive DNO-photoresist for Microsystem Technologies
J. Schulz
T. Mono
J. Mohr
Technical Papers Pages: 50 - 55
Synchrotron radiation analysis of microstructures
N. Mölders
H. O. Moser
V. Saile
Technical Papers Pages: 56 - 62
Tribological investigations of LIGA-microstructures
T. Bieger
U. Wallrabe
Technical Papers Pages: 63 - 70
Studies of the adhesion properties of LIGA microstructures by X-ray spectroscopy and mechanical measurements
D. Kadereit
J. Hormes
A. El-Kholi
Technical Papers Pages: 71 - 74
Dimensional measurement of micro mechanical components with HAR
U. Breitmeier
G. Häusler
Technical Papers Pages: 75 - 78
A source of kolovolt X-ray
F. Villa
A. Luccio
M. Zolotorev
Technical Papers Pages: 79 - 82
Light opitcal deformation measurements in microbars with nanometer resolution
E. Mazza
G. Danuser
J. Dual
Technical Papers Pages: 83 - 91
Determination of Young's modulus and residual stress of electroless nickel using test structures fabricated in a new surface micromachining process
S. Roy
S. Furukawa
M. Mehregany
Technical Papers Pages: 92 - 96
Stereolithography and microtechniques
S. Zissi
A. Bertsch
J. C. André
Technical Papers Pages: 97 - 102
A source of kilovolt X-ray
F. Villa
A. Luccio
M. Zolotorev
Pages: 79 - 82
Light optical deformation measurements in microbars with nanometer resolution
E. Mazza
G. Danuser
J. Dual
Pages: 83 - 91