International Conference on High Aspect-Ratio Microstructure Technology HARMST '95 P. BleyW. MenzH. O. Moser Editorial Pages: 39 - 39
Fabrication of stepped microoptical benches for fibre and free space applications A. MüllerJ. GöttertA. Rogner Technical Papers Pages: 40 - 45
The copolymer of methyl methacrylate and methacrylic acid as a sensitive resist for deep-etch X-ray lithography T. NumazawaY. HirataH. Takada Technical Papers Pages: 46 - 49
The effect of residual solvent on the profiles of thick positive DNO-photoresist for Microsystem Technologies J. SchulzT. MonoJ. Mohr Technical Papers Pages: 50 - 55
Synchrotron radiation analysis of microstructures N. MöldersH. O. MoserV. Saile Technical Papers Pages: 56 - 62
Tribological investigations of LIGA-microstructures T. BiegerU. Wallrabe Technical Papers Pages: 63 - 70
Studies of the adhesion properties of LIGA microstructures by X-ray spectroscopy and mechanical measurements D. KadereitJ. HormesA. El-Kholi Technical Papers Pages: 71 - 74
Dimensional measurement of micro mechanical components with HAR U. BreitmeierG. Häusler Technical Papers Pages: 75 - 78
Light opitcal deformation measurements in microbars with nanometer resolution E. MazzaG. DanuserJ. Dual Technical Papers Pages: 83 - 91
Determination of Young's modulus and residual stress of electroless nickel using test structures fabricated in a new surface micromachining process S. RoyS. FurukawaM. Mehregany Technical Papers Pages: 92 - 96
Light optical deformation measurements in microbars with nanometer resolution E. MazzaG. DanuserJ. Dual Pages: 83 - 91