Fabrication of PZT nano dot array and their ferroelectric properties Gaoyang ZhaoZhezhe WangXiaocui Deng Technical Paper 20 March 2012 Pages: 531 - 535
A novel DMTL capacitive switch with electrostatic actuation MAM capacitors Cheng DengJingfu BaoXinghai Zhao Technical Paper 22 March 2012 Pages: 537 - 541
A passive mechanism for thermal stress regulation in micro-machined beam-type structures Pezhman A. HassanpourPatricia M. NievaAmir Khajepour Technical Paper 31 March 2012 Pages: 543 - 556
Robust regulation and tracking system design for multivariable control of the tape transport mechanism Hamed MoradiFirooz Bakhtiari-NejadAria Alasty Technical Paper 05 April 2012 Pages: 557 - 573
Multi-dofs MEMS displacement sensors based on the Stewart platform theory Andrea Mura Technical Paper 13 March 2012 Pages: 575 - 579
Manufacturing and replication of glass pyramidal micro-structures by using the injection moulding process M. SahliC. MillotT. Barrière Technical Paper 30 March 2012 Pages: 581 - 589
Piezoresistive polypropylene–carbon nanofiber composites as mechanical transducers A. J. PaleoF. W. J. van HattumS. Lanceros-Méndez Technical Paper 28 March 2012 Pages: 591 - 597
Measurement of contact potential difference in head disk interface by readback signal spectrum Mingsheng ZhangBo Liu Technical Paper 10 April 2012 Pages: 599 - 602
Polyimide/tetraethoxysilane-based hybrid polyfilms for microelectronics application S. K. KurmvanshiP. R. PatelJ. M. Keller Technical Paper 13 March 2012 Pages: 603 - 611
A miniaturized bulk micromachined triaxial accelerometer fabricated using deep reactive etching through a multilevel thickness membrane Luca PetriccaChristopher GrindePer Ohlckers Technical Paper 10 February 2012 Pages: 613 - 622
Fabrication of polymer micro-tip by optical lensing technique Pradip Kumar DeySoumen DasPranabendu Ganguly Technical Paper 22 March 2012 Pages: 623 - 628
Fabrication and measurements of dynamic response of an SOI based non-planar CMUT array Tugrul ZureSazzadur Chowdhury Technical Paper 05 April 2012 Pages: 629 - 638
Study of dynamic characteristics of resonators for MEMS resonant vibratory gyroscopes Li YanFan ShangchunCao Le Technical Paper 28 March 2012 Pages: 639 - 647
Investigation of wax and paper materials for the fabrication of paper-based microfluidic devices Z. W. ZhongZ. P. WangG. X. D. Huang Technical Paper 13 March 2012 Pages: 649 - 659
Static characterization of microstructures using AOMSI and temporal phase-shifting (TPS) methods Davoud JahaniSivakumar NarayanswamyMurali Manohohar Pai Technical Paper 28 March 2012 Pages: 661 - 666
Low temperature deposited titanium boride thin films and their application to surface engineering of microscale mold inserts Yang MuKe ChenFanghua Mei Technical Paper 13 March 2012 Pages: 667 - 677