Abstract
This paper demonstrates a promising and low-cost method for fabricating PZT nano-dot array by using sol–gel template method combined with laser interference lithography. ZrO2 template with the pitch of 1 μm is firstly fabricated by sol–gel method and laser interference with a 325 nm He-Cd laser. Afterwards, PZT nano dot array with diameter of 500 nm and thickness of 20 nm is prepared on the ZrO2 template. Atomic force microscope results show that the PZT nano dot array is uniform and highly ordered. Ferroelectric properties of PZT nano dot array are in situ measured through online-operation of TF analyzer and AFM. A ferroelectric hysteresis loop is obtained for the PZT nano dot.
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Acknowledgments
This work is supported by the National Natural Science Foundation of China (No. 51072163) and the the Specialized Research Fund for the Doctoral Program of Higher Education (No. 20096118110002). It is also supported by the Special Funds for the Construction of Key Disciplines Project of Shaanxi Province.
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Zhao, G., Wang, Z., Xu, G. et al. Fabrication of PZT nano dot array and their ferroelectric properties. Microsyst Technol 18, 531–535 (2012). https://doi.org/10.1007/s00542-012-1479-z
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DOI: https://doi.org/10.1007/s00542-012-1479-z